Paper
14 February 2003 Voxel shapes in two-photon microfabrication
Robert J. DeVoe, Harvey W. Kalweit, Catherine A. Leatherdale, Todd R. Williams
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Abstract
Maximization of scan speed and throughput while maintaining resolution is critical for commercialization of two-photon microfabrication technology. We report contrast curves for cationic and free radical two-photon polymerization. An unusual relationship between voxel shape and dose is observed where the voxel ranges from highly asymmetric (aspect ratio of 4:1 or greater) at high dose to nearly spherical low dose (aspect ratio 1:1 or lower). Similar behavior is observed for both types of polymerization systems suggesting that the change is aspect ratio is not a function of the specific type of chemistry. It is found that a simple optical model describing the intensity distribution near the focal point can predict the change in aspect ratio.
© (2003) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Robert J. DeVoe, Harvey W. Kalweit, Catherine A. Leatherdale, and Todd R. Williams "Voxel shapes in two-photon microfabrication", Proc. SPIE 4797, Multiphoton Absorption and Nonlinear Transmission Processes: Materials, Theory, and Applications, (14 February 2003); https://doi.org/10.1117/12.459028
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Cited by 25 scholarly publications.
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KEYWORDS
Polymerization

Photoresist materials

Microfabrication

Polymers

Epoxies

Gaussian beams

Beam shaping

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