Advanced irradiation methods of femtosecond laser for embedded microfabrication of transparent materials

Y. Cheng; Koji Sugioka; Masashi Masuda; Masako Kawachi; Kazuhiko Shihoyama; Koichi Toyoda; Katsumi Midorikawa

doi:10.1117/12.486586

19 February 2003 Advanced irradiation methods of femtosecond laser for embedded microfabrication of transparent materials

Y. Cheng, Koji Sugioka, Masashi Masuda, Masako Kawachi, Kazuhiko Shihoyama, Koichi Toyoda, Katsumi Midorikawa

Author Affiliations +

Proceedings Volume 4830, Third International Symposium on Laser Precision Microfabrication; (2003) https://doi.org/10.1117/12.486586
Event: LAMP 2002: International Congress on Laser Advanced Materials Processing, 2002, Osaka, Japan

Abstract

Large scale, true three dimensional (3D) microchannel structures have been fabricated in photosensitive glass by femtosecond (fs) laser. In general, the microchannel fabricated inside glass by scanning focal spot of fs laser perpendicularly to the laser propagation direction gets an elliptical shape with a large aspect ratio of its cross section, which is undesirable to most of micro total analysis systems (μ-TAS) or micro fluidic devices. In this paper, we describe how to improve the aspect ratio of the fabricated microchannel by using advanced irradiation methods of fs laser.

Citation Download Citation

Y. Cheng, Koji Sugioka, Masashi Masuda, Masako Kawachi, Kazuhiko Shihoyama, Koichi Toyoda, and Katsumi Midorikawa "Advanced irradiation methods of femtosecond laser for embedded microfabrication of transparent materials", Proc. SPIE 4830, Third International Symposium on Laser Precision Microfabrication, (19 February 2003); https://doi.org/10.1117/12.486586

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