Three-dimensional laser microfabrication

Koji Sugioka

doi:10.1117/12.595676

8 October 2004 Three-dimensional laser microfabrication

Koji Sugioka

Author Affiliations +

Proceedings Volume 5662, Fifth International Symposium on Laser Precision Microfabrication; (2004) https://doi.org/10.1117/12.595676
Event: Fifth International Symposium on Laser Precision Microfabrication, 2004, Nara, Japan

Abstract

Laser microfabrication is currently one of key technologies for manufacturing various kinds of microdevices and microsystems. Additionally, three-dimensional (3-D) laser microfabrication is getting more important and more desirable for integrating functions and miniaturizing the size of devices and systems. The present paper describes a variety of 3-D laser microfabrication based on chemical vapor deposition (CVD), ablation modification and lithography. One of the hottest topics in this field is fabrication of 3-D microstructures embedded in transparent materials by multiphoton absorption process using femtosecond laser. Advantages of 3-D laser microfabrication is also discussed by comparison with competitive techniques like mechanical machining, electron beam processing and ion beam processing.

Citation Download Citation

Koji Sugioka "Three-dimensional laser microfabrication", Proc. SPIE 5662, Fifth International Symposium on Laser Precision Microfabrication, (8 October 2004); https://doi.org/10.1117/12.595676

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