Fabrication of microreactors in photostructurable glass by 3D femtosecond laser direct write

Koji Sugioka; Ya Cheng; Masashi Masuda; Katsumi Midorikawa; Kazuhiko Shihoyama

doi:10.1117/12.531630

15 July 2004 Fabrication of microreactors in photostructurable glass by 3D femtosecond laser direct write

Koji Sugioka, Ya Cheng, Masashi Masuda, Katsumi Midorikawa, Kazuhiko Shihoyama

Proceedings Volume 5339, Photon Processing in Microelectronics and Photonics III; (2004) https://doi.org/10.1117/12.531630
Event: Lasers and Applications in Science and Engineering, 2004, San Jose, Ca, United States

Abstract

Three-dimensional (3-D) microstructuring of photostructurable glass is demonstrated by using femtosecond (fs) laser for Lab.-on-chip, in other words, micro total analysis system (μ-TAS), application. The fs laser direct-write process followed by a thermal treatment and chemical etching in a HF aqueous solution produces true 3-D hollow microstructures embedded in the photostructurable glass. This technique is applied for manufacturing a microfluidic structure inside the glass. Mixing of two kinds of aqueous solutions is demonstrated in the fabricated structure. A freely movable microplate is also fabricated inside glass to control a stream of reagents in the microfluidics. To give additional functions to the fabricated microfluidics, selective metal plating of the glass i s performed by the fs laser irradiation in an electroless plating solution. This paper also discusses the mechanism of photostructurable glass modification by the fs laser.

Citation Download Citation

Koji Sugioka, Ya Cheng, Masashi Masuda, Katsumi Midorikawa, and Kazuhiko Shihoyama "Fabrication of microreactors in photostructurable glass by 3D femtosecond laser direct write", Proc. SPIE 5339, Photon Processing in Microelectronics and Photonics III, (15 July 2004); https://doi.org/10.1117/12.531630

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