Absorptance measurements for the DUV spectral range by laser calorimetry

Holger Blaschke; Marco Jupe; Detlev Ristau

doi:10.1117/12.472385

30 May 2003 Absorptance measurements for the DUV spectral range by laser calorimetry

Holger Blaschke, Marco Jupe, Detlev Ristau

Proceedings Volume 4932, Laser-Induced Damage in Optical Materials: 2002 and 7th International Workshop on Laser Beam and Optics Characterization; (2003) https://doi.org/10.1117/12.472385
Event: XXXIV Annual Symposium on Optical Materials for High Power Lasers: Boulder Damage Symposium, 2002, Boulder, CO, United States

Abstract

The determination of absorptance in optical components is of crucial interest in respect to their power-handling capability. As a fundamental loss mechanism in the DUV/VUV spectral range, the absorptance is a significant parameter to decide the applicability of an optic in the industrial facilities. The established measuring technique of laser-calorimetry in accordance to the standard ISO 11551 was adapted to the wavelength of the ArF-laser (λ = 193 nm). The present paper describes the developed set-up considering the problems of calibration in the DUV spectral range. In detail, the electrical and optical calibration method were performed and different effects are discussed with regard to the practicability of both procedures. Furthermore, the reduction of scattered light in combination with a remarkable increase in sensitivity is demonstrated. As typical substrate materials for optical components at this laser wavelength, fused silica and CaF₂ were investigated determining the absorptance. Simultaneously, the characteristic luminescence spectrum has been recorded during the investigations.

Citation Download Citation

Holger Blaschke, Marco Jupe, and Detlev Ristau "Absorptance measurements for the DUV spectral range by laser calorimetry", Proc. SPIE 4932, Laser-Induced Damage in Optical Materials: 2002 and 7th International Workshop on Laser Beam and Optics Characterization, (30 May 2003); https://doi.org/10.1117/12.472385

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