Cyclotene diaphragm for MEMS-based IR detectors

Shuwen Guo

doi:10.1117/12.472808

15 January 2003 Cyclotene diaphragm for MEMS based IR detectors

Shuwen Guo

Proceedings Volume 4979, Micromachining and Microfabrication Process Technology VIII; (2003) https://doi.org/10.1117/12.472808
Event: Micromachining and Microfabrication, 2003, San Jose, CA, United States

Abstract

A novel structure employing Dow Chemical (Midland, MI) benzocyclobutene (BCB) Cyclotene as a diaphragm material is presented in this report. The main advantages of this BCB diaphragm are its low thermal conductivity, robustness, chemical inertness, low curing temperature and high structure yield. Moreover, a BCB film can be either photo-defined or plasma etched and is a suitable micromachining material for post IC processing. Micromachined IR thermopile single detectors and lineal detector arrays (1×16), using BiSeTeSb/BiSbTe sensing elements on BCB diaphragms, have been constructed and tested. Up to 100% structure yield has been obtained. The process used to realize this detector structure is compatible with the eventual inclusion of on-chip circuitry for signal amplification and conditioning.

Citation Download Citation

Shuwen Guo "Cyclotene diaphragm for MEMS based IR detectors", Proc. SPIE 4979, Micromachining and Microfabrication Process Technology VIII, (15 January 2003); https://doi.org/10.1117/12.472808

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