Fabrication of diffractive phase elements by F2-laser ablation of fused silica

Malte Schulz-Ruthenberg; Juergen Ihlemann; Gerd Marowsky; Amir H. Nejadmalayeri; Mi Li Ng; Jianzhao Li; Peter R. Herman

doi:10.1117/12.541070

18 November 2003 Fabrication of diffractive phase elements by F₂-laser ablation of fused silica

Malte Schulz-Ruthenberg, Juergen Ihlemann, Gerd Marowsky, Amir H. Nejadmalayeri, Mi Li Ng, Jianzhao Li, Peter R. Herman

Proceedings Volume 5063, Fourth International Symposium on Laser Precision Microfabrication; (2003) https://doi.org/10.1117/12.541070
Event: Fourth International Symposium on Laser Precision Microfabrication, 2003, Munich, Germany

Abstract

F₂-laser ablation at 157 nm was used for generating sub-micron surface relief structures on fused silica to define binary diffractive phase elements (DPE). A pattern array of 128 x 128 pixels was excised using the F₂ laser in combination with a high resolution processing system comprising of CaF₂ beam-homogenization optics and a high-resolution Schwarzschild reflective objective. A square projection mask provided precise excisions in less than 10 x 10 μm² spots, having sub-μm depths that were controlled by the laser fluence and the number of laser pulses to provide for the required phase delay between ablated and non-ablated pixels. Thus a diffractive phase element (DPE) optimized for first order in the UV spectral range was made. A four-level DPE design computed by the Iterative Fourier Transform Algorithm (IFTA) will be described for generating an arbitrary irradiation pattern without the point symmetry of a two level design.

Citation Download Citation

Malte Schulz-Ruthenberg, Juergen Ihlemann, Gerd Marowsky, Amir H. Nejadmalayeri, Mi Li Ng, Jianzhao Li, and Peter R. Herman "Fabrication of diffractive phase elements by F₂-laser ablation of fused silica", Proc. SPIE 5063, Fourth International Symposium on Laser Precision Microfabrication, (18 November 2003); https://doi.org/10.1117/12.541070

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available