Phase-shifting diffraction grating interferometer for testing concave mirrors

Tae-Joon Hwang; Seung-Woo Kim

doi:10.1117/12.500194

30 May 2003 Phase-shifting diffraction grating interferometer for testing concave mirrors

Tae-Joon Hwang, Seung-Woo Kim

Proceedings Volume 5144, Optical Measurement Systems for Industrial Inspection III; (2003) https://doi.org/10.1117/12.500194
Event: Optical Metrology, 2003, Munich, Germany

Abstract

We present a novel concept of phase-shifting diffraction-grating interferometer, which is intended for the optical testing of concave mirrors with high precision. The interferometer is configured with a single reflective diffraction grating, which performs manifold functions of beam splitting, beam recombination, and phase shifting. The reference and test wave fronts are generated by means of reflective diffraction at the focal plane of a microscope objective with large numerical aperture, which allows testing fast mirrors with low f-numbers. The fiber-optic confocal design is adopted for the microscope objective to focus a converging beam on the diffractive grating, which greatly reduces the alignment error between the focusing optics and the diffraction grating. Translating the grating provides phase shifting, which enables to measure the figure errors of the test mirror to nanometer accuracy.

Citation Download Citation

Tae-Joon Hwang and Seung-Woo Kim "Phase-shifting diffraction grating interferometer for testing concave mirrors", Proc. SPIE 5144, Optical Measurement Systems for Industrial Inspection III, (30 May 2003); https://doi.org/10.1117/12.500194

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