Compact interferometer for micro-optic performance and shape characterization

Kate M. Medicus; Devendra Karodkar; Brent C. Bergner; Neil Gardner; Angela Davies

doi:10.1117/12.506052

3 November 2003 Compact interferometer for micro-optic performance and shape characterization

Kate M. Medicus, Devendra Karodkar, Brent C. Bergner, Neil Gardner, Angela Davies

Proceedings Volume 5183, Lithographic and Micromachining Techniques for Optical Component Fabrication II; (2003) https://doi.org/10.1117/12.506052
Event: Optical Science and Technology, SPIE's 48th Annual Meeting, 2003, San Diego, California, United States

Abstract

We have focused on measurement needs for micro-refractive lenses and have developed a flexible and compact micro-interferometer that can be used to measure lens radius of curvature and form errors. Transmitted wavefront and back focal length measurements can be easily added to the instrument. This instrument addresses measurement needs for micro refractive lenses. The interferometer is based on a Mitutoyo metallurgical microscope and operates with a 633 nm helium neon source. The radius of curvature measurement is directly traceable, meaning an external artifact is not required for calibration. This requires a careful mechanical design, a detailed alignment procedure with estimates of alignment uncertainties, and stage error motion characterization with estimates of uncertainties. The instrument can also be used to measure some diffractive components and mold form errors. We describe the instrument in this paper and discuss design goals and measurement specifications.

Citation Download Citation

Kate M. Medicus, Devendra Karodkar, Brent C. Bergner, Neil Gardner, and Angela Davies "Compact interferometer for micro-optic performance and shape characterization", Proc. SPIE 5183, Lithographic and Micromachining Techniques for Optical Component Fabrication II, (3 November 2003); https://doi.org/10.1117/12.506052

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