Unspecified Brent C. Bergner Profile

Brent C. Bergner

Metrology Manager at Onto Innovation

SPIE Involvement:

Conference Program Committee | Author | Leadership Workshop Facilitator | Science Fair Judge

Proceedings Article | 18 August 2018 Presentation + Paper

Specification and measurement of uncertainty in phase shifting Fizeau interferometry

Brent Bergner

Proceedings Volume 10749, 107490S (2018) https://doi.org/10.1117/12.2323640

KEYWORDS: Phase shifts, Wavefronts, Phase measurement, Calibration, Data modeling, Sensors, Interferometry, Manufacturing, Optical testing, Phase shifting

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Proceedings Article | 18 May 2012 Paper

Compact low-cost waveguide-based optical spectrometer for detection of chemical/biological agents

Brent Bergner, Pradeep Kumar, David Cook, Ivan Avrutsky

Proceedings Volume 8374, 83740Z (2012) https://doi.org/10.1117/12.919622

KEYWORDS: Waveguides, Spectroscopy, Sensors, Planar waveguides, Nanoimprint lithography, Semiconducting wafers, Surface enhanced Raman spectroscopy, Signal detection, Reactive ion etching, Lithography

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Proceedings Article | 12 May 2011 Paper

Light focusing by chirped waveguide grating coupler

Pradeep Kumar, Brent Bergner, David Cook, Ivan Avrutsky

Proceedings Volume 8032, 803203 (2011) https://doi.org/10.1117/12.884071

KEYWORDS: Waveguides, Planar waveguides, Grazing incidence, CMOS sensors, Sensors, Refractive index, Integrated optics, Image sensors, Waveguide modes, Spectroscopy

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Proceedings Article | 20 April 2011 Paper

Mueller matrix ellipsometry of artificial non-periodic line edge roughness in presence of finite numerical aperture

Martin Foldyna, Thomas Germer, Brent Bergner

Proceedings Volume 7971, 79710N (2011) https://doi.org/10.1117/12.879518

KEYWORDS: Line edge roughness, Data modeling, Ellipsometry, Mueller matrices, Spectroscopy, Line width roughness, Silicon, Numerical modeling, Process control, Optics manufacturing

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Proceedings Article | 23 March 2009 Paper

Effect of line-width roughness on optical scatterometry measurements

Brent Bergner, Thomas Germer, Thomas Suleski

Proceedings Volume 7272, 72720U (2009) https://doi.org/10.1117/12.813770

KEYWORDS: Line width roughness, Scatterometry, Reflectivity, Scatter measurement, Optical testing, Modulation, Birefringence, Edge roughness, Silicon, Polarization

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Proceedings Article | 5 April 2007 Paper

Application of perturbation methods in optical scatterometry

B. Bergner, T. Suleski

Proceedings Volume 6518, 651829 (2007) https://doi.org/10.1117/12.712291

KEYWORDS: Photonic crystals, Inverse optics, Scatterometry, Reflectivity, Dispersion, Dielectrics, Process control, Edge roughness, Solids, Scattering

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Proceedings Article | 27 August 2005 Paper

Measurement advances for micro-refractive fabrication

Neil Gardner, Angela Davies, Brent Bergner

Proceedings Volume 5858, 58580P (2005) https://doi.org/10.1117/12.622753

KEYWORDS: Calibration, Interferometers, Wavefronts, Lenses, Objectives, Metrology, Micro optics, Process control, Tolerancing, Confocal microscopy

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Proceedings Article | 22 December 2003 Paper

Traceable radius of curvature measurements on a micro-interferometer

Devendra Karodkar, Neil Gardner, Brent Bergner, Angela Davies

Proceedings Volume 5180, (2003) https://doi.org/10.1117/12.506416

KEYWORDS: Calibration, Interferometers, Confocal microscopy, Motion measurement, Eye, Beam splitters, Microscopes, Tolerancing, Mirrors, Optics manufacturing

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Proceedings Article | 22 December 2003 Paper

Self-calibration technique for transmitted wavefront measurements

Brent Bergner, Angela Davies

Proceedings Volume 5180, (2003) https://doi.org/10.1117/12.506408

KEYWORDS: Wavefronts, Calibration, Interferometers, Monochromatic aberrations, Objectives, Mirrors, Refraction, Microscopes, Micro optics, Optical testing

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Proceedings Article | 10 November 2003 Paper

Improving metrology for micro-optics manufacturing

Angela Davies, Brent Bergner, Neil Gardner

Proceedings Volume 5177, (2003) https://doi.org/10.1117/12.505057

KEYWORDS: Calibration, Interferometers, Wavefronts, Micro optics, Metrology, Manufacturing, Eye, Monochromatic aberrations, Confocal microscopy, Spherical lenses

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Proceedings Article | 3 November 2003 Paper

Compact interferometer for micro-optic performance and shape characterization

Kate Medicus, Devendra Karodkar, Brent Bergner, Neil Gardner, Angela Davies

Proceedings Volume 5183, (2003) https://doi.org/10.1117/12.506052

KEYWORDS: Interferometers, Calibration, Beam splitters, Objectives, Distance measurement, Wavefronts, Microscopes, Optical testing, Mirrors, Lenses

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Proceedings Article | 3 November 2003 Paper

Application of precision diamond machining to the manufacture of microphotonics components

Matthew Davies, Christopher Evans, Rashmi Vohra, Brent Bergner, Steven Patterson

Proceedings Volume 5183, (2003) https://doi.org/10.1117/12.506373

KEYWORDS: Diamond, Diamond machining, Manufacturing, Diamond turning, Micro optics, Nickel, Crystals, Optics manufacturing, Lithography, Electronics

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Proceedings Article | 25 October 2002 Paper

High-resolution measurement of the free spectral range of an etalon

P. Douglas Knight, Alvaro Cruz-Cabrera, Brent Bergner

Proceedings Volume 4772, (2002) https://doi.org/10.1117/12.451810

KEYWORDS: Fabry–Perot interferometers, Telecommunications, Tunable lasers, Multiplexing, Detection theory, Diodes, Calibration, Optical signal processing, Optical components, Dense wavelength division multiplexing

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Proceedings Article | 2 September 1992 Paper

Contouring of a free oil surface

William Meyers, Brent Bergner, Ronald White, David Huff, H. Philip Stahl

Proceedings Volume 1779, (1992) https://doi.org/10.1117/12.140938

KEYWORDS: Wavefronts, Ronchi rulings, Fringe analysis, Mirrors, Interferometry, Chromatic aberrations, Collimation, Metals, Thermography, Optical design

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Showing 5 of 14 publications

Conference Committee Involvement (6)

Interferometry and Structured Light 2024

21 August 2024 | San Diego, California, United States

Interferometry XXI

24 August 2022 | San Diego, California, United States

Interferometry XX

24 August 2020 | Online Only, California, United States

Interferometry XIX

21 August 2018 | San Diego, California, United States

Interferometry XVII: Techniques and Analysis

17 August 2014 | San Diego, California, United States

Showing 5 of 6 Conference Committees

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