Point-diffraction interferometer for 3D profile measurement of rough surfaces

Seung-Woo Kim; Byoung-Chang Kim

doi:10.1117/12.507074

10 November 2003 Point-diffraction interferometer for 3D profile measurement of rough surfaces

Seung-Woo Kim, Byoung-Chang Kim

Proceedings Volume 5191, Optical Diagnostics for Fluids, Solids, and Combustion II; (2003) https://doi.org/10.1117/12.507074
Event: Optical Science and Technology, SPIE's 48th Annual Meeting, 2003, San Diego, California, United States

Abstract

We present a point-diffraction interferometer specially devised for the profile measurement of rough surfaces that are difficult to be measured with conventional two-arm interferometers. The diffraction interferometer comprises multiple two-point-diffraction sources made of a pair of single-mode optical fibers, and performs an absolute profile measurement by projecting multiple fringe patterns on the object surface and then fitting measured phase data into a global geometrical model of multilateration. Test measurement results demonstrate that the proposed point-diffraction interferometer is well suited for the warpage inspection of microelectronics components with excessive height irregularities, such as unpolished backsides of silicon wafers and plastic molds of integrated-circuit chip packages.

Citation Download Citation

Seung-Woo Kim and Byoung-Chang Kim "Point-diffraction interferometer for 3D profile measurement of rough surfaces", Proc. SPIE 5191, Optical Diagnostics for Fluids, Solids, and Combustion II, (10 November 2003); https://doi.org/10.1117/12.507074

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