Paper
25 February 2004 Uniformity analysis and design optimization of multilayer thin film filters used in fiber optics communication systems
Minghong Yang, Jinsong Liu, Qingming Chen, Bo Zhang
Author Affiliations +
Abstract
Thin film filters used in fibre optics communications are strictly defined, which requires a totally uniform thickness distribution over the coated substrate. In this paper we firstly analyse the thickness distribution related to chamber geometry and source emission function. Chamber layout and source function are optimised for large area uniformity.
© (2004) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Minghong Yang, Jinsong Liu, Qingming Chen, and Bo Zhang "Uniformity analysis and design optimization of multilayer thin film filters used in fiber optics communication systems", Proc. SPIE 5250, Advances in Optical Thin Films, (25 February 2004); https://doi.org/10.1117/12.531887
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KEYWORDS
Transmittance

Thin films

Refractive index

Semiconducting wafers

Optical filters

Wafer-level optics

Distortion

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