Characterization of next-generation bake plate requirements for 193-nm lithography tools

Phong T. Do; Ann Kang; Joseph Pender; Thomas Lehmann; Leo McArdle; Farhat Quli; James Pascale

doi:10.1117/12.537592

28 May 2004 Characterization of next-generation bake plate requirements for 193-nm lithography tools

Phong T. Do, Ann Kang, Joseph Pender, Thomas Lehmann, Leo McArdle, Farhat Quli, James Pascale

Proceedings Volume 5377, Optical Microlithography XVII; (2004) https://doi.org/10.1117/12.537592
Event: Microlithography 2004, 2004, Santa Clara, California, United States

Abstract

In this study, we have characterized a bake process for a 193nm poly process. We used a wafer dynamic sensor plate, which uses embedded thin film platinum RTDs (resistance temperature detector) from SensArray to capture temperature information across the hot plate and throughout the baking process. Our goal is to see whether we can use current hot plates and bake processes to meet the requirements set by the International Technology Roadmap for Semiconductor (ITRS). Two different types of hot plates from Tokyo Electron are being evaluated, LHP (low temperature hot plate) and PCH (precision chill plate).

Citation Download Citation

Phong T. Do, Ann Kang, Joseph Pender, Thomas Lehmann, Leo McArdle, Farhat Quli, and James Pascale "Characterization of next-generation bake plate requirements for 193-nm lithography tools", Proc. SPIE 5377, Optical Microlithography XVII, (28 May 2004); https://doi.org/10.1117/12.537592

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available