Evaluation systems of F2 laser lithography materials

Yasuo Itakura; Youichi Kawasa; Keiji Egawa; Akira Sumitani; Hironao Sasaki; Iwao Higasikawa; Shigeo Irie; Kiyoshi Fujii; Toshiro Itani; Hitoshi Nakano; Hideo Hata

doi:10.1117/12.534839

28 May 2004 Evaluation systems of F₂ laser lithography materials

Yasuo Itakura, Youichi Kawasa, Keiji Egawa, Akira Sumitani, Hironao Sasaki, Iwao Higasikawa, Shigeo Irie, Kiyoshi Fujii, Toshiro Itani, Hitoshi Nakano, Hideo Hata

Author Affiliations +

Proceedings Volume 5377, Optical Microlithography XVII; (2004) https://doi.org/10.1117/12.534839
Event: Microlithography 2004, 2004, Santa Clara, California, United States

Abstract

In this paper, we present an evaluation system for F₂ laser lithography masks and resists and we report preliminary test results. The evaluation system has two subsystems that are based on very accurate measurement technology. One subsystem is used for mask evaluation, the other subsystem for resist evaluation. The mask subsystem consists of two units. One unit evaluates real size 6025 binary masks placed horizontally as inside steppers. This unit measures three parameters: 1) the real time in-situ transmittance at 157nm during F₂ laser irradiation, 2) the in-situ VUV transmittance using a VUV spectrophotometer and 3) the deformation of the pellicle. The precision of transmittance measurement at 157nm is +/-0.5%. The precision of the pellicle deformation measurement is +/-0.1μm. The second unit of the mask subsystem collects samples of the mask outgassing and analyzes them in a gas chromatograph mass spectrometer. The resist evaluation subsystem consists of three units. 1) One unit determines negative effects of outgassing resist contaminants on the transmittance of optical materials under F₂ laser irradiation, 2) the second unit analyzes the outgassing from resists and 3) the third unit examines the effectiveness of exposure tool purge nozzles to reduce outgassing contamination.

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Yasuo Itakura, Youichi Kawasa, Keiji Egawa, Akira Sumitani, Hironao Sasaki, Iwao Higasikawa, Shigeo Irie, Kiyoshi Fujii, Toshiro Itani, Hitoshi Nakano, and Hideo Hata "Evaluation systems of F₂ laser lithography materials", Proc. SPIE 5377, Optical Microlithography XVII, (28 May 2004); https://doi.org/10.1117/12.534839

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KEYWORDS

Transmittance

Pellicles

Fluorine

Photomasks

Lithography

Laser irradiation

Semiconducting wafers

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