Visible-light inspection of EUVL multilayer mask blanks

Takeo Hashimoto; Hiromasa Yamanashi; Shinji Miyagaki; Iwao Nishiyama

doi:10.1117/12.557772

20 August 2004 Visible-light inspection of EUVL multilayer mask blanks

Takeo Hashimoto, Hiromasa Yamanashi, Shinji Miyagaki, Iwao Nishiyama

Proceedings Volume 5446, Photomask and Next-Generation Lithography Mask Technology XI; (2004) https://doi.org/10.1117/12.557772
Event: Photomask and Next Generation Lithography Mask Technology XI, 2004, Yokohama, Japan

Abstract

Mask blank inspection is a critical issue in EUV lithography. Visible-light inspection has the advantages of a high throughput and a low tool cost, while actinic inspection potentially has a high inspection capability. The Hamamatsu Photonics Super Fine Particle Detection System, which employs dark-field scattering optics, has a high detection sensitivity and throughput. It is able to detect PSL spheres with diameters below 50 nm on a Si substrate. So, we tried using it to detect fine PSL spheres on Mo/Si multilayer mask blanks. 60-nm PSL spheres were detected, but noise arising from the surface roughness of the Mo/Si multilayer prevented the accurate detection of PSL spheres with diameters of less than 50 nm. Thus, it is important to reduce the surface roughness of the multilayer in order to improve the inspection capability of visible-light inspection systems.

Citation Download Citation

Takeo Hashimoto, Hiromasa Yamanashi, Shinji Miyagaki, and Iwao Nishiyama "Visible-light inspection of EUVL multilayer mask blanks", Proc. SPIE 5446, Photomask and Next-Generation Lithography Mask Technology XI, (20 August 2004); https://doi.org/10.1117/12.557772

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