Paper
25 May 2004 Gas-deposited WO3 nanoparticles studied by scanning force microscopy
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Proceedings Volume 5472, Noise and Information in Nanoelectronics, Sensors, and Standards II; (2004) https://doi.org/10.1117/12.547356
Event: Second International Symposium on Fluctuations and Noise, 2004, Maspalomas, Gran Canaria Island, Spain
Abstract
WO3 nanoparticles were generated by gas deposition. Deposits on Al substrates were studied by scanning force microscopy operated in the intermittent-contact (tapping) mode. At low surface coverage (< 0.5 %), we observed single nanoparticles with a mean size of ~ 1.5 nm. An increase of the amount of particles led to agglomerates, which appeared at surface coverages as low as 2 to 4 %. At full coverage the mean agglomerate size was ~ 5 nm. This value did not change as the sample was annealed at temperatures up to 250 °C. The size distribution of the agglomerates was found to be log-normal, i.e., similar to the size distribution of the gas-phase nanoparticles forming the deposit. For explaining the obtained log-normal size distribution of the agglomerates simulations of the agglomeration process were also carried out.
© (2004) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Judit Kopniczky, Anders Hoel, A. Mechler, Peter Heszler, and Claes-Goran Granqvist "Gas-deposited WO3 nanoparticles studied by scanning force microscopy", Proc. SPIE 5472, Noise and Information in Nanoelectronics, Sensors, and Standards II, (25 May 2004); https://doi.org/10.1117/12.547356
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KEYWORDS
Nanoparticles

Particles

Atomic force microscopy

Tungsten

Annealing

Sensors

Aluminum

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