Accelerometer sensitivity calibration by phase differences of a single-channel laser interferometer: theory

Shing Chen

doi:10.1117/12.579602

22 June 2004 Accelerometer sensitivity calibration by phase differences of a single-channel laser interferometer: theory

Shing Chen

Author Affiliations +

Proceedings Volume 5503, Sixth International Conference on Vibration Measurements by Laser Techniques: Advances and Applications; (2004) https://doi.org/10.1117/12.579602
Event: Sixth International Conference on Vibration Measurements by Laser Techniques: Advances and Applications, 2004, Ancona, Italy

Abstract

Two methods based upon the digitized modulation phase of a single channel laser interference photo signal are derived to compute the displacement amplitude of an accelerometer. One is an analytical method that can easily calculate the displacement amplitude of an accelerometer from digitized modulation phase by simple algebraic equations as long as these modulation phases are in the same 2π argument and the signal is noise free. The other method is using least squares to curve fit the digitized modulation phases of a laser interference signal with noise. The advantages of these methods are that, without changing any experimental setup, one can use the existing primary calibration laser interferometer system that follows the ISO 16063-11 and the phase mismatch and amplitude mismatch of a two-beam laser system can be avoided. From frequency range 2 Hz to 10000 Hz and displacement amplitude range 0.02 μm to 10000 μm, the computer simulated results show that the relative errors of curve fitted displacement amplitude and starting time phase angle are insensitive to different noise levels and the relative error of starting time phase angle is much smaller than that of displacement amplitude.

Citation Download Citation

Shing Chen "Accelerometer sensitivity calibration by phase differences of a single-channel laser interferometer: theory", Proc. SPIE 5503, Sixth International Conference on Vibration Measurements by Laser Techniques: Advances and Applications, (22 June 2004); https://doi.org/10.1117/12.579602

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