Methods to recognize the sample position for most precise interferometric length measurements

Rene Schoedel; Jennifer E. Decker

doi:10.1117/12.555835

2 August 2004 Methods to recognize the sample position for most precise interferometric length measurements

Rene Schoedel, Jennifer E. Decker

Proceedings Volume 5532, Interferometry XII: Applications; (2004) https://doi.org/10.1117/12.555835
Event: Optical Science and Technology, the SPIE 49th Annual Meeting, 2004, Denver, Colorado, United States

Abstract

In interferometric length measurements the position of the sample with respect to the interference phase map is very important. Even the pixel resolution of the camera array may limit the measurement uncertainty, depending on the amount of the sample’s non-parallelism. In this case a correction can be applied taking into account a sub-pixel position at the sample’s front measuring face. In this paper three different methods are introduced which can be used for the definition of a sub-pixel central coordinate. Measurement examples illustrate that a value of 0.04 pixels for the standard uncertainty associated with the sub-pixel position seems realistic.

Citation Download Citation

Rene Schoedel and Jennifer E. Decker "Methods to recognize the sample position for most precise interferometric length measurements", Proc. SPIE 5532, Interferometry XII: Applications, (2 August 2004); https://doi.org/10.1117/12.555835

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