Investigation of thermal expansion homogeneity by optical interferometry

R. Schodel

doi:10.1117/12.612582

26 August 2005 Investigation of thermal expansion homogeneity by optical interferometry

R. Schodel

Proceedings Volume 5858, Nano- and Micro-Metrology; 58580Q (2005) https://doi.org/10.1117/12.612582
Event: Optical Metrology, 2005, Munich, Germany

Abstract

Different measurement methods exist for the extraction of the coefficient of thermal expansion (CTE). Among them the observation of the sample length as a function of its temperature is the direct way. In the last decade, the use of phase shifting interferometry in combination with computer-based analysis of interference phase maps drastically improved interferometrical length measurements. In addition to the observation of the length itself, such measurements allow the extraction of a length topography L(x,y) of the sample as shown in this paper. From the behaviour of the length topography at different temperatures an upper limit of CTE-homogeneity can be obtained. It is shown in which way disturbing influences can be removed so that uncertainties of L(x,y) in the sub-nm range can be reached for different shaped samples

Citation Download Citation

R. Schodel "Investigation of thermal expansion homogeneity by optical interferometry", Proc. SPIE 5858, Nano- and Micro-Metrology, 58580Q (26 August 2005); https://doi.org/10.1117/12.612582

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