Vibration diagnosis and remediation design for an x-ray optics stitching interferometer system

Curt A. Preissner; Lahsen Assoufid; Deming Shu

doi:10.1117/12.560646

18 October 2004 Vibration diagnosis and remediation design for an x-ray optics stitching interferometer system

Curt A. Preissner, Lahsen Assoufid, Deming Shu

Proceedings Volume 5533, Advances in Mirror Technology for X-Ray, EUV Lithography, Laser, and Other Applications II; (2004) https://doi.org/10.1117/12.560646
Event: Optical Science and Technology, the SPIE 49th Annual Meeting, 2004, Denver, Colorado, United States

Abstract

The Advanced Photon Source (APS) x-ray optics Metrology Laboratory currently operates a small-aperture Wyko laser interferometer in a stitching configuration. While the stitching configuration allows for easier surface characterization of long x-ray substrates and mirrors, the addition of mechanical components for optic element translation can compromise the ultimate measurement performance of the interferometer. A program of experimental vibration measurements, quantifying the laboratory vibration environment and identifying interferometer support-system behavior, has been conducted. Insight gained from the ambient vibration assessment and modal analysis has guided the development of a remediation technique. Discussion of the problem diagnosis and possible solutions are presented in this paper.

Citation Download Citation

Curt A. Preissner, Lahsen Assoufid, and Deming Shu "Vibration diagnosis and remediation design for an x-ray optics stitching interferometer system", Proc. SPIE 5533, Advances in Mirror Technology for X-Ray, EUV Lithography, Laser, and Other Applications II, (18 October 2004); https://doi.org/10.1117/12.560646

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