Study of irradiation damage of Sc/Si multilayer mirrors with a 46.9-nm tabletop laser

Georgiy O. Vaschenko; Michael E. Grisham; Carmen S. Menoni; Jorge J. G. Rocca; Yuriy P. Pershin; Evgeniy N. Zubarev; Dmitrii L. Voronov; Viktoria A. Sevryukova; Valeriy V. Kondratenko; Alexander V. Vinogradov; Igor A. Artioukov

doi:10.1117/12.557952

10 November 2004 Study of irradiation damage of Sc/Si multilayer mirrors with a 46.9-nm tabletop laser

Georgiy O. Vaschenko, Michael E. Grisham, Carmen S. Menoni, Jorge J. G. Rocca, Yuriy P. Pershin, Evgeniy N. Zubarev, Dmitrii L. Voronov, Viktoria A. Sevryukova, Valeriy V. Kondratenko, Alexander V. Vinogradov, Igor A. Artioukov

Author Affiliations +

Proceedings Volume 5534, Fourth Generation X-Ray Sources and Optics II; (2004) https://doi.org/10.1117/12.557952
Event: Optical Science and Technology, the SPIE 49th Annual Meeting, 2004, Denver, Colorado, United States

Abstract

We demonstrate the use of a tabletop capillary-discharge Ne-like Ar laser emitting nanosecond duration pulses at a wavelength of 46.9 nm for investigation of radiation damage mechanism and damage threshold in Sc/Si extreme ultraviolet multilayer mirrors. To vary the emission load at the surface of the mirror under test the intense 0.13 mJ laser pulses were focused using a spherical Sc/Si multilayer mirror to obtain fluences ranging from ~ 0.01 to >10 J/cm². Single spots and large area patterns (2x2 mm²) were irradiated depending on the type of surface analysis technique employed. Damage threshold fluences of ~ 0.08 J/cm² were measured for Sc/Si coatings deposited on both borosilicate glass and Si substrates, compared to the 0.7 J/cm² found necessary to damage a bare Si substrate. The use of scanning and transmission electron microscopy, and small-angle X-ray diffraction techniques revealed the thermal nature of the damage mechanism. These results are relevant to the use of the Sc/Si mirrors in combination with newly developed high power EUV sources, and provide a benchmark for their further improvement.

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Georgiy O. Vaschenko, Michael E. Grisham, Carmen S. Menoni, Jorge J. G. Rocca, Yuriy P. Pershin, Evgeniy N. Zubarev, Dmitrii L. Voronov, Viktoria A. Sevryukova, Valeriy V. Kondratenko, Alexander V. Vinogradov, and Igor A. Artioukov "Study of irradiation damage of Sc/Si multilayer mirrors with a 46.9-nm tabletop laser", Proc. SPIE 5534, Fourth Generation X-Ray Sources and Optics II, (10 November 2004); https://doi.org/10.1117/12.557952

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