Optical spectral properties of periodic micro- and nanostructures in Si and GaAs

Shlomo Hava; Nathan Pinhas; Mark Auselender; Ari Cohen-Nov

doi:10.1117/12.582430

28 February 2005 Optical spectral properties of periodic micro- and nanostructures in Si and GaAs

Shlomo Hava, Nathan Pinhas, Mark Auselender, Ari Cohen-Nov

Proceedings Volume 5649, Smart Structures, Devices, and Systems II; (2005) https://doi.org/10.1117/12.582430
Event: Smart Materials, Nano-, and Micro-Smart Systems, 2004, Sydney, Australia

Abstract

Periodic structures with minimum feature sizes in the scale of the mean radiation wavelength or less attract considerable interest due to the peculiarity of their electromagnetic (EM) response. When interference and diffraction effects become sufficiently strong, novel and interesting phenomena emerge in reflectivity, transmissivity, absorbance and even infrared thermal emission. The nanotechnology processing enables the production of high-efficiency diffraction gratings with quite small periods, down to the nanometer range, with aspect ratios higher than in spectroscopic gratings. In this paper we present the spectral measurements (transmission and thermal emission) of GaAs and silicon samples with lamella 1D gratings and mesa 2D structures. We also present the theoretical and simulation tools developed for the design and analysis of multilayer lamellar grating structures.

Citation Download Citation

Shlomo Hava, Nathan Pinhas, Mark Auselender, and Ari Cohen-Nov "Optical spectral properties of periodic micro- and nanostructures in Si and GaAs", Proc. SPIE 5649, Smart Structures, Devices, and Systems II, (28 February 2005); https://doi.org/10.1117/12.582430

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