Estimations on high energy ions and neutral particles from LPP EUV light sources

H. Furukawa; T. Kawamura; T. Nishikawa; A. Sasaki; K. Fujima; S. Fujioka; H. Nishimura; K. Nishihara; N. Miyanaga; Y. Izawa; C. Yamanaka

doi:10.1117/12.597959

6 May 2005 Estimations on high energy ions and neutral particles from LPP EUV light sources

H. Furukawa, T. Kawamura, T. Nishikawa, A. Sasaki, K. Fujima, S. Fujioka, H. Nishimura, K. Nishihara, N. Miyanaga, Y. Izawa, C. Yamanaka

Author Affiliations +

Proceedings Volume 5751, Emerging Lithographic Technologies IX; (2005) https://doi.org/10.1117/12.597959
Event: Microlithography 2005, 2005, San Jose, California, United States

Abstract

We have developed an integrated Laser Ablation Fluid Radiation simulation Code (LAFRAC) to estimate the behaviors of highly energetic ions and neutral particles from LPP EUV light sources, and estimated recombination and charge transfer processes between the particles from laser-produced Xe EUV light sources. We clarify that charge transfer effects greatly affect on the number density of neutral particles, especially high energy (more than roughly 500 eV) neutral particles.

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H. Furukawa, T. Kawamura, T. Nishikawa, A. Sasaki, K. Fujima, S. Fujioka, H. Nishimura, K. Nishihara, N. Miyanaga, Y. Izawa, and C. Yamanaka "Estimations on high energy ions and neutral particles from LPP EUV light sources", Proc. SPIE 5751, Emerging Lithographic Technologies IX, (6 May 2005); https://doi.org/10.1117/12.597959

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