Silicon resonant cavity enhanced photodetectors at 1.55 µm

M. Casalino; L. Sirleto; L. Moretti; D. Panzera; S. Libertino; I. Rendina

doi:10.1117/12.608984

7 July 2005 Silicon resonant cavity enhanced photodetectors at 1.55 μm

M. Casalino, L. Sirleto, L. Moretti, D. Panzera, S. Libertino, I. Rendina

Proceedings Volume 5840, Photonic Materials, Devices, and Applications; (2005) https://doi.org/10.1117/12.608984
Event: Microtechnologies for the New Millennium 2005, 2005, Sevilla, Spain

Abstract

Silicon optical receivers, operating at the optical communication wavelengths in the 1.3-1.55 μm range, have attracted much research effort. Unfortunately, the performance of the devices proposed in literature are poor because this wavelength range is beyond the absorption edge of silicon. In order to extend the maximum detectable wavelength, the most common approach, in the realization of Si-based detectors, is the use of silicon-germanium layers on silicon, anyway, requiring processes non compatible with standard CMOS technology. In this paper, with the aim to extend the operation of silicon-based photo-detectors up to the 1.3-1.55 μm range, an alternative approach is investigated: we propose the design of a resonant cavity enhanced Schottky photodetector based on the internal photoemission effect. The device fabrication is completely compatible with standard silicon technology.

Citation Download Citation

M. Casalino, L. Sirleto, L. Moretti, D. Panzera, S. Libertino, and I. Rendina "Silicon resonant cavity enhanced photodetectors at 1.55 μm", Proc. SPIE 5840, Photonic Materials, Devices, and Applications, (7 July 2005); https://doi.org/10.1117/12.608984

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available