Mask enhancement factor for 2D local CD error

Yukiyasu Arisawa; Shoji Mimotogi

doi:10.1117/12.617209

28 June 2005 Mask enhancement factor for 2D local CD error

Yukiyasu Arisawa, Shoji Mimotogi

Proceedings Volume 5853, Photomask and Next-Generation Lithography Mask Technology XII; (2005) https://doi.org/10.1117/12.617209
Event: Photomask and Next Generation Lithography Mask Technology XII, 2005, Yokohama, Japan

Abstract

With ever decreasing feature sizes, the control of mask CD errors is becoming increasingly critical in order to realize a good lithographic performance. In our previous study, mask CD errors were classified on the basis of spatial frequency into the following three categories: local CD error, global CD error, and line edge roughness (LER). If the period of a mask CD error exceeds the optical proximity effect (OPE) range, the mask CD error is classified as a global CD error. If the period is almost equal to the OPE range, the mask CD error is classified as a local CD error. As compared with the OPE range, the LER has very small spatial frequency. Introducing the concept of mask enhancement factor (MEF) for local and global CD errors, we examined the ratio of local MEF to global MEF for 1-dimensional dense and isolated line patterns. In this paper, we build on our previous study, dealing with 2-dimensional rectangular patterns. In addition, we introduce the “local MEF matrix,” which reflects the characteristics of a pattern layout and aids the estimation of local CD errors. Furthermore, we discuss the required mask specifications of 2D patterns for low-k1 lithography.

Citation Download Citation

Yukiyasu Arisawa and Shoji Mimotogi "Mask enhancement factor for 2D local CD error", Proc. SPIE 5853, Photomask and Next-Generation Lithography Mask Technology XII, (28 June 2005); https://doi.org/10.1117/12.617209

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available