500-mm-aperture wavelength-tuning phase-shifting interferometer

Liqun Chai; Qiao Xu; Yingjie Yu; Yang Deng; Jiancheng Xu

doi:10.1117/12.611796

13 June 2005 500-mm-aperture wavelength-tuning phase-shifting interferometer

Liqun Chai, Qiao Xu, Yingjie Yu, Yang Deng, Jiancheng Xu

Proceedings Volume 5856, Optical Measurement Systems for Industrial Inspection IV; (2005) https://doi.org/10.1117/12.611796
Event: Optical Metrology, 2005, Munich, Germany

Abstract

A 500-mm-aperture wavelength-tuning phase-shifting interferometer has been developed in FOERC applied to the measurement of large optics. Also it can switches to a smaller 130-mm-aperture. We describes in detail the optical and mechanical design as well as calibration technique of phase shifter and phase-shifting algorithm design. A Zygo 4 inch standard reflective flat is used to evaluate the accuracy and repeatability of our wavelength-tuning phase-shifting system.

Citation Download Citation

Liqun Chai, Qiao Xu, Yingjie Yu, Yang Deng, and Jiancheng Xu "500-mm-aperture wavelength-tuning phase-shifting interferometer", Proc. SPIE 5856, Optical Measurement Systems for Industrial Inspection IV, (13 June 2005); https://doi.org/10.1117/12.611796

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