Development of a two-dimensional nano-displacement measuring system utilizing a combined optical and x-ray interferometer

Jinwon Park; Jaegeun Jo; Sangho Byun; Cheon Il Eom

doi:10.1117/12.619174

18 August 2005 Development of a two-dimensional nano-displacement measuring system utilizing a combined optical and x-ray interferometer

Jinwon Park, Jaegeun Jo, Sangho Byun, Cheon Il Eom

Author Affiliations +

Proceedings Volume 5879, Recent Developments in Traceable Dimensional Measurements III; 587912 (2005) https://doi.org/10.1117/12.619174
Event: Optics and Photonics 2005, 2005, San Diego, California, United States

Abstract

We have developed a two-dimensional nano-displacement measuring system utilizing a combined optical and x-ray interferometer (COXI). The system consists of optical interferometers for two-dimensional displacements and an x-ray interferometer. The x-ray interferometer was used to calibrate the non-linearity of the optical interferometers. The x-ray interferometer can subdivide the optical interference signal with 0.2 nm linear scales. The measured non-linearity of the heterodyne optical interferometer was less than 2 nm. The calibrated optical interferometers were used to measure two dimensional nanoscale displacements, and the accuracy of the optical interferometers was reduced to sub-nanometer after the compensation. To demonstrate the application of the system, we have measured the non-linearity of capacitive sensors using the calibrated optical interferometers.

Citation Download Citation

Jinwon Park, Jaegeun Jo, Sangho Byun, and Cheon Il Eom "Development of a two-dimensional nano-displacement measuring system utilizing a combined optical and x-ray interferometer", Proc. SPIE 5879, Recent Developments in Traceable Dimensional Measurements III, 587912 (18 August 2005); https://doi.org/10.1117/12.619174

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available