Scanning force microscopy for optical surface metrology

M. Flemming; K. Roder; A. Duparré

doi:10.1117/12.624341

19 October 2005 Scanning force microscopy for optical surface metrology

M. Flemming, K. Roder, A. Duparré

Proceedings Volume 5965, Optical Fabrication, Testing, and Metrology II; 59650A (2005) https://doi.org/10.1117/12.624341
Event: Optical Systems Design 2005, 2005, Jena, Germany

Abstract

Surface structures with lateral dimensions in the nanometer range (⪅ 100 nm) have a significant impact on the optical and functional surface properties. Scanning Force Microscopy (SFM) has been increasingly used to investigate the nanotopography of substrates and thin films. SFM data evaluation is nevertheless so far mainly restricted to qualitative image information or single roughness parameters. Appropriate description of statistical surface roughness needs an advanced quantitative data analysis, which can be accomplished by Power Spectral Density (PSD) functions. For nanostructures conclusions about the information content of measurement results are difficult and only possible in a qualified manner. The results can be strongly influenced by the geometry of the probe tip, whose lateral dimension is in the nanometer range too. Based on experimental/empirical work, we estimated tip size effects on the PSDs of thin films. Especially the SFM measurement of super smooth samples (e.g. substrates for EUV coatings) can also be affected by inherent noise of the system. We therefore also present and discuss methods of noise analysis.

Citation Download Citation

M. Flemming, K. Roder, and A. Duparré "Scanning force microscopy for optical surface metrology", Proc. SPIE 5965, Optical Fabrication, Testing, and Metrology II, 59650A (19 October 2005); https://doi.org/10.1117/12.624341

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