Dr. Angela Duparré Profile

Dr. Angela Duparré

Head of Group at Fraunhofer IOF

SPIE Involvement:

Track Chair | Author | Editor

Publications (88)

Proceedings Article | 12 July 2019 Open Access

New light absorbing material for grazing angles

A. Yevtushenko, A. von Finck, D. Katsir, A. Duparré

Proceedings Volume 11180, 111808D (2019) https://doi.org/10.1117/12.2536220

KEYWORDS: Reflectivity, Bidirectional reflectance transmission function, Stray light, Sensors, Reflection, Optical design, Optical components, Optical coatings, Telescopes, Stars

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Proceedings Article | 28 May 2018 Paper

New light absorbing material for grazing angles

A. Yevtushenko, A. von Finck, D. Katsir, A. Duparré

Proceedings Volume 10695, 106950J (2018) https://doi.org/10.1117/12.2315607

KEYWORDS: Reflectivity, Bidirectional reflectance transmission function, Stray light, Sensors, Reflection, Optical design, Optical components, Optical coatings, Space telescopes, Telescopes

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Proceedings Article | 17 November 2017 Open Access

Light scattering techniques for the characterization of optical components

M. Hauptvogel, S. Schröder, T. Herffurth, M. Trost, A. von Finck, A. Duparré, T. Weigel

Proceedings Volume 10563, 1056347 (2017) https://doi.org/10.1117/12.2304146

KEYWORDS: Light scattering, Scattering, Bidirectional reflectance transmission function, Scatter measurement, Mirrors, Optical components, Astronomical imaging, Optical coatings, Laser scattering, Optical testing

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Proceedings Article | 25 September 2017 Open Access

Vane-free design for star trackers and telescopes

A. Yevtushenko, A. von Finck, D. Katsir, H. Shfaram, Angela Duparré

Proceedings Volume 10562, 1056215 (2017) https://doi.org/10.1117/12.2296236

KEYWORDS: Reflectivity, Bidirectional reflectance transmission function, Sensors, Stray light, Telescopes, Stars, Reflection, Ray tracing, Light scattering, Optical instrument design

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Proceedings Article | 25 September 2017 Open Access

Light scattering characterization of optical components for space applications

M. Hauptvogel, M. Trost, A. Costille, D. Penka, U. Zeitner, S. Schröder, A. Duparré

Proceedings Volume 10562, 1056213 (2017) https://doi.org/10.1117/12.2296113

KEYWORDS: Light scattering, Scattering, Optical components, Scatter measurement, Astronomical imaging, Sensors, Diffraction, Bidirectional reflectance transmission function, Optical testing, Diffraction gratings

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Proceedings Article | 22 May 2015 Paper

Angle resolved backscatter of HfO2/SiO2 multilayer mirror at 1064 nm

Jue Wang, Sven Schröder, Marcus Trost, Matthias Hauptvogel, Angela Duparré

Proceedings Volume 9453, 94530T (2015) https://doi.org/10.1117/12.2190663

KEYWORDS: Backscatter, Multilayers, Light scattering, Mirrors, Scattering, Plasma, Coating, Scatter measurement, Atomic force microscopy, Optical testing

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Proceedings Article | 5 November 2014 Paper

Light scattering characterization of optical components: BRDF, BTDF, and scatter losses

Sven Schröder, Alexander Finck, Dina Katsir, Uwe Zeitner, Angela Duparré

Proceedings Volume 9272, 927202 (2014) https://doi.org/10.1117/12.2071908

KEYWORDS: Light scattering, Scattering, Bidirectional reflectance transmission function, Optical coatings, Optical components, Scatter measurement, Diffraction gratings, Stray light, Mirrors, Data modeling

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SPIE Journal Paper | 11 August 2014

In situ and ex situ characterization of optical surfaces by light scattering techniques

Marcus Trost, Tobias Herffurth, Sven Schröder, Angela Duparré, Matthias Beier, Stefan Risse, Andreas Tünnermann, Norbert Bowering

OE, Vol. 53, Issue 09, 092013, (August 2014) https://doi.org/10.1117/12.10.1117/1.OE.53.9.092013

KEYWORDS: Light scattering, Scattering, Scatter measurement, Spatial frequencies, Mirrors, Sensors, Magnetorheological finishing, Optics manufacturing, Polishing, Optical testing

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Proceedings Article | 19 September 2013 Paper

Roughness, optical, and wetting properties of nanostructured thin films

Sven Schröder, Luisa Coriand, Angela Duparré

Proceedings Volume 8818, 88180S (2013) https://doi.org/10.1117/12.2027347

KEYWORDS: Light scattering, Spatial frequencies, Coating, Thin film coatings, Atomic force microscopy, Stochastic processes, Nanostructures, Scattering, Chemistry, Thin films

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Proceedings Article | 7 September 2013 Paper

Angle and wavelength resolved light scattering measurement of optical surfaces and thin films

Sven Schröder, David Unglaub, Alexander von Finck, Matthias Hauptvogel, Marcus Trost, Tobias Herffurth, Angela Duparré, John Stover

Proceedings Volume 8838, 883802 (2013) https://doi.org/10.1117/12.2024144

KEYWORDS: Light scattering, Scattering, Scatter measurement, Optical testing, Coating, Thin films, Optical components, Etching, Thin film coatings, Optical spheres

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Proceedings Article | 7 September 2013 Paper

Estimating hemispherical scatter from incident plane measurements of isotropic samples scattering from both bulk and surface irregularities

John Stover, Sven Schroeder, Alexander von Finck, David Unglaub, Angela Duparré

Proceedings Volume 8838, 883803 (2013) https://doi.org/10.1117/12.2024550

KEYWORDS: Bidirectional reflectance transmission function, Scattering, Spatial frequencies, Reflection, Scatter measurement, Laser scattering, Statistical analysis, Aluminum, Light scattering, Surface roughness

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Proceedings Article | 9 July 2013 Paper

Using light scattering to investigate damage-relevant imperfections of surfaces, coatings, and bulk materials

Sven Schröder, Marcus Trost, Tobias Herffurth, Angela Duparré

Proceedings Volume 8786, 87860S (2013) https://doi.org/10.1117/12.2020478

KEYWORDS: Scattering, Light scattering, Laser scattering, Scatter measurement, Optical coatings, 3D metrology, Rayleigh scattering, Surface finishing, Optical components, Thin film coatings

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Proceedings Article | 4 December 2012 Paper

Light scattering to detect imperfections relevant for laser-induced damage

Tobias Herffurth, Sven Schröder, Marcus Trost, Angela Duparré

Proceedings Volume 8530, 85301B (2012) https://doi.org/10.1117/12.977453

KEYWORDS: Light scattering, Scattering, Laser scattering, Surface finishing, Laser induced damage, Polishing, Sensors, Optical coatings, Autoregressive models, Interfaces

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Proceedings Article | 19 October 2012 Paper

Roughness characterization of EUV multilayer coatings and ultra-smooth surfaces by light scattering

M. Trost, S. Schröder, C. C. Lin, A. Duparré, A. Tünnermann

Proceedings Volume 8501, 85010F (2012) https://doi.org/10.1117/12.929887

KEYWORDS: Light scattering, Multilayers, Scattering, Extreme ultraviolet, Scatter measurement, Interfaces, Spatial frequencies, Atomic force microscopy, Optical testing, Surface roughness

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Proceedings Article | 15 October 2012 Paper

Estimating hemispherical scatter from incident plane measurements of isotropic samples

John Stover, Sven Schröder, Alexander von Finck, Angela Duparré

Proceedings Volume 8495, 84950F (2012) https://doi.org/10.1117/12.930773

KEYWORDS: Bidirectional reflectance transmission function, Scattering, 3D metrology, Spatial frequencies, Scatter measurement, Statistical analysis, Laser scattering, Stray light, Specular reflections, Silicon

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Proceedings Article | 15 October 2012 Paper

Sophisticated light scattering techniques from the VUV to the IR regions

Sven Schröder, Marcus Trost, Tobias Herffurth, Alexander von Finck, Angela Duparré

Proceedings Volume 8495, 84950V (2012) https://doi.org/10.1117/12.929923

KEYWORDS: Scattering, Light scattering, Scatter measurement, 3D metrology, Laser scattering, Thin film coatings, Diffraction gratings, Optical testing, Vacuum ultraviolet, Surface finishing

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Proceedings Article | 23 March 2012 Paper

Optical performance of LPP multilayer collector mirrors

Torsten Feigl, Marco Perske, Hagen Pauer, Tobias Fiedler, Sergiy Yulin, Marcus Trost, Sven Schröder, Angela Duparré, Norbert Kaiser, Andreas Tünnermann, Norbert Böwering, Alex Ershov, Kay Hoffmann, Bruno La Fontaine, Kevin Cummings

Proceedings Volume 8322, 832217 (2012) https://doi.org/10.1117/12.919735

KEYWORDS: Mirrors, Extreme ultraviolet, Coating, Reflectivity, Multilayers, EUV optics, Light sources, Plasma, Extreme ultraviolet lithography, Light scattering

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SPIE Journal Paper | 6 February 2012

Total integrated scatter from surfaces with arbitrary roughness, correlation widths, and incident angles

James Harvey, Narak Choi, Sven Schroeder, Angela Duparré

OE, Vol. 51, Issue 1, 013402, (February 2012) https://doi.org/10.1117/12.10.1117/1.OE.51.1.013402

KEYWORDS: Spatial frequencies, Surface roughness, Optical fabrication, Image quality, Tolerancing, Optical engineering, Extreme ultraviolet, Metrology, Bidirectional reflectance transmission function, Surface finishing

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Proceedings Article | 30 September 2011 Paper

Impact of surface roughness on the scatter losses and the scattering distribution of surfaces and thin film coatings

Sven Schröder, Tobias Herffurth, Angela Duparré, James Harvey

Proceedings Volume 8169, 81690R (2011) https://doi.org/10.1117/12.896989

KEYWORDS: Scattering, Light scattering, Surface roughness, Thin film coatings, Surface finishing, Scatter measurement, Rayleigh scattering, Autoregressive models, Thin films, Interfaces

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Proceedings Article | 30 September 2011 Paper

Roughness characterization of large EUV mirror optics by laser light scattering

Marcus Trost, Sven Schröder, Torsten Feigl, Angela Duparré, Andreas Tünnermann

Proceedings Volume 8169, 81690P (2011) https://doi.org/10.1117/12.896792

KEYWORDS: Extreme ultraviolet, Light scattering, Reflectivity, Scattering, Mirrors, EUV optics, Scatter measurement, Coating, Surface finishing, Laser optics

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Proceedings Article | 27 September 2011 Paper

Determining parametric TIS behavior from optical fabrication metrology data

James Harvey, Sven Shröder, Narak Choi, Angela Duparré

Proceedings Volume 8126, 81260X (2011) https://doi.org/10.1117/12.894571

KEYWORDS: Spatial frequencies, Surface roughness, Optical fabrication, Metrology, Scattering, Tolerancing, Surface finishing, Optics manufacturing, Bidirectional reflectance transmission function, Image analysis

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Proceedings Article | 8 April 2011 Paper

Efficient specification and characterization of surface roughness for extreme ultraviolet optics

Sven Schröder, Marcus Trost, Torsten Feigl, James Harvey, Angela Duparré

Proceedings Volume 7969, 79692C (2011) https://doi.org/10.1117/12.891280

KEYWORDS: Light scattering, Mirrors, Extreme ultraviolet, Spatial frequencies, Scattering, Surface roughness, EUV optics, Scatter measurement, Surface finishing, Manufacturing

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Proceedings Article | 31 December 2009 Paper

Angle resolved scattering: a method for in situ investigations of laser-induced damage?

Sven Schröder, Tobias Herffurth, Angela Duparré

Proceedings Volume 7504, 75041H (2009) https://doi.org/10.1117/12.850389

KEYWORDS: Coating, Scattering, Light scattering, Laser induced damage, Scatter measurement, Interfaces, Multilayers, Laser scattering, Thin film coatings, Autoregressive models

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Proceedings Article | 25 September 2008 Paper

Finish assessment of complex surfaces by advanced light scattering techniques

Sven Schröder, Angela Duparré

Proceedings Volume 7102, 71020F (2008) https://doi.org/10.1117/12.797964

KEYWORDS: Light scattering, Scattering, Scatter measurement, Surface finishing, Mirrors, Polishing, Extreme ultraviolet, Optical testing, Spatial frequencies, 3D metrology

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Proceedings Article | 25 September 2008 Paper

Metal mirrors with excellent figure and roughness

R. Steinkopf, A. Gebhardt, S. Scheiding, M. Rohde, O. Stenzel, S. Gliech, V. Giggel, H. Löscher, G. Ullrich, P. Rucks, A. Duparre, S. Risse, R. Eberhardt, A. Tünnermann

Proceedings Volume 7102, 71020C (2008) https://doi.org/10.1117/12.797702

KEYWORDS: Mirrors, Metals, Single point diamond turning, Polishing, Surface finishing, Diamond turning, Aluminum, Manufacturing, Diamond, Optics manufacturing

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Proceedings Article | 21 March 2008 Paper

Scattering of EUV optics: substrate, coating, and degradation effects

Sven Schröder, Nicolas Benoit, Torsten Feigl, Angela Duparré, Andreas Tünnermann

Proceedings Volume 6921, 69212Q (2008) https://doi.org/10.1117/12.772609

KEYWORDS: Scattering, Reflectivity, Coating, Mirrors, Multilayers, Extreme ultraviolet, Interfaces, Scatter measurement, EUV optics, Autoregressive models

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Proceedings Article | 15 January 2007 Paper

Characterization of thin films and bulk materials for DUV optical components

Sven Schröder, Mathias Kamprath, Angela Duparré

Proceedings Volume 6403, 64031L (2007) https://doi.org/10.1117/12.695408

KEYWORDS: Scattering, Deep ultraviolet, Silica, Optical components, Polishing, Thin film coatings, Autoregressive models, Interfaces, Light scattering, Thin films

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Proceedings Article | 23 February 2006 Paper

Scattering analysis of optical components in the DUV

Sven Schröder, Stefan Gliech, Angela Duparré

Proceedings Volume 6101, 61011H (2006) https://doi.org/10.1117/12.647416

KEYWORDS: Scattering, Light scattering, Scatter measurement, Multilayers, Deep ultraviolet, Atomic force microscopy, Optical components, Mirrors, Extreme ultraviolet, Optical spheres

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Proceedings Article | 20 October 2005 Paper

Scanning force microscopy for optical surface metrology

M. Flemming, K. Roder, A. Duparré

Proceedings Volume 5965, 59650A (2005) https://doi.org/10.1117/12.624341

KEYWORDS: Atomic force microscopy, Spatial frequencies, Multilayers, Semiconducting wafers, Silicon, Interference (communication), Metrology, Thin film coatings, Thin films, Nanostructures

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Proceedings Article | 20 October 2005 Paper

Sensitive and flexible light scatter techniques from the VUV to IR regions

Sven Schröder, Stefan Gliech, Angela Duparré

Proceedings Volume 5965, 59651B (2005) https://doi.org/10.1117/12.625780

KEYWORDS: Light scattering, Scattering, Scatter measurement, Multilayers, Vacuum ultraviolet, Mirrors, Autoregressive models, Deep ultraviolet, Optical spheres, Backscatter

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Proceedings Article | 5 October 2005 Paper

Nanostructure and optical properties of fluoride films for high-quality DUV/VUV optical components

Sven Schröder, Hein Uhlig, Angela Duparré, Norbert Kaiser

Proceedings Volume 5963, 59630R (2005) https://doi.org/10.1117/12.624499

KEYWORDS: Mirrors, Multilayers, Reflectivity, Atomic force microscopy, Absorption, Interfaces, Deep ultraviolet, Vacuum ultraviolet, Single mode fibers, Optical components

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Proceedings Article | 1 September 2005 Paper

Surface texture investigation of ultra-precision optical components

Sven Schroeder, Juliane Ratteit, Stefan Gliech, Angela Duparre

Proceedings Volume 5878, 587813 (2005) https://doi.org/10.1117/12.616500

KEYWORDS: Scattering, Light scattering, Mirrors, Multilayers, Optics manufacturing, Autoregressive models, Scatter measurement, Sensors, Interfaces, Atomic force microscopy

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Proceedings Article | 31 August 2005 Paper

Scatter analysis of optical components from 193 nm to 13.5 nm

Sven Schroeder, Mathias Kamprath, Stefan Gliech, Angela Duparre

Proceedings Volume 5878, 58780T (2005) https://doi.org/10.1117/12.616423

KEYWORDS: Scattering, Light scattering, Extreme ultraviolet, Scatter measurement, Optical components, Mirrors, Multilayers, Laser scattering, Autoregressive models, Deep ultraviolet

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Proceedings Article | 31 August 2005 Paper

Investigating the ArF laser stability of CaF2 at elevated fluences

A. Burkert, Ch. Muehlig, W. Triebel, D. Keutel, U. Natura, L. Parthier, S. Gliech, S. Schroeder, A. Duparre

Proceedings Volume 5878, 58780E (2005) https://doi.org/10.1117/12.616904

KEYWORDS: Absorption, Scattering, Laser induced fluorescence, Laser scattering, Laser irradiation, Laser stabilization, Excimers, Light scattering, Luminescence, Excimer lasers

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Proceedings Article | 21 February 2005 Paper

Determination of scattering losses in ArF* excimer laser all-dielectric mirrors for 193 nm microlithography application

J. Earl Rudisill, Angela Dupparre, Sven Schroeder

Proceedings Volume 5647, (2005) https://doi.org/10.1117/12.584743

KEYWORDS: Coating, Scattering, Reflectivity, Laser scattering, Oxides, Silica, Deep ultraviolet, Mirrors, Atomic force microscopy, Excimer lasers

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Proceedings Article | 25 February 2004 Paper

Modeling and characterizing thin film nanostructures for ultrahydrophobic surfaces with controlled optical scatter

Marcel Flemming, Annette Hultaker, Karsten Reihs, Angela Duparre

Proceedings Volume 5250, (2004) https://doi.org/10.1117/12.512694

KEYWORDS: Coating, Thin films, Light scattering, Scattering, Nanostructures, Atomic force microscopy, Solids, Water, Optical interferometry, Scanning tunneling microscopy

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Proceedings Article | 25 February 2004 Paper

157- and 193-nm scatter, R, and T measurement technique

Stefan Gliech, Henning Gessner, Annette Hultaker, Angela Duparre

Proceedings Volume 5250, (2004) https://doi.org/10.1117/12.513321

KEYWORDS: Scatter measurement, Reflectivity, Vacuum ultraviolet, Transmittance, Scattering, Optical spheres, Backscatter, Autoregressive models, Light scattering, Deep ultraviolet

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Proceedings Article | 25 February 2004 Paper

Characterization of CaF₂ substrates for VUV fluoride coatings

Annette Hultaker, Stefan Gliech, Henning Gessner, Angela Duparre

Proceedings Volume 5250, (2004) https://doi.org/10.1117/12.512691

KEYWORDS: Scattering, Vacuum ultraviolet, Atomic force microscopy, Optical coatings, Scatter measurement, Light scattering, Surface finishing, Polishing, Autoregressive models, Silicon

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Proceedings Article | 4 November 2003 Paper

Characterization procedures for nanorough ultrahydrophobic surfaces with controlled optical matter

Marcel Flemming, Karsten Reihs, Angela Duparre

Proceedings Volume 5188, (2003) https://doi.org/10.1117/12.505599

KEYWORDS: Optical inspection, Coating, Light scattering, Scattering, Glasses, Scatter measurement, Water, Reflection, Nanotechnology, Optical coatings

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Proceedings Article | 4 November 2003 Paper

VUV light-scattering measurements of substrates and thin film coatings

Annette Hultaker, Stefan Gliech, Nils Benkert, Angela Duparre

Proceedings Volume 5188, (2003) https://doi.org/10.1117/12.505585

KEYWORDS: Scatter measurement, Scattering, Light scattering, Reflectivity, Transmittance, Vacuum ultraviolet, Atomic force microscopy, Thin film coatings, Backscatter, Optical coatings

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Proceedings Article | 30 May 2003 Paper

System for angle-resolved and total light scattering, transmittance, and reflectance measurements of optical components at 157 nm and 193 nm

Stefan Gliech, Henning Gessner, Angela Duparre

Proceedings Volume 4932, (2003) https://doi.org/10.1117/12.472395

KEYWORDS: Light scattering, Reflectivity, Transmittance, Optical testing, Optical components, Laser optics, Sensors, Laser induced damage, Optical spheres, Digital Light Processing

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Proceedings Article | 30 May 2003 Paper

Characterizing CaF2 for VUV optical components: roughness, surface scatter, and bulk scatter

Annette Hultaker, Nils Benkert, Stefan Gliech, Angela Duparre

Proceedings Volume 4932, (2003) https://doi.org/10.1117/12.472392

KEYWORDS: Vacuum ultraviolet, Optical components, Laser optics, Dysprosium, Scattering, Laser induced damage, Ruthenium, Scatter measurement, Surface roughness, Reflectivity

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Proceedings Article | 30 May 2003 Paper

Results of a round-robin experiment on reflectivity measurments at a wavelength of 1.06 micron

Detlef Nickel, Christoph Fleig, Andrea Erhard, Andreas Letsch, Adolf Giesen, Marco Jupe, Kai Starke, Detlev Ristau, Oswald Wilhelm, Rudolf Huber, Rainer Haspel, Uwe Schuhmann, Chris Scharfenorth, Hans Joachim Eichler, Stefan Gliech, Angela Duparre, Michael Schulz-Grosser, Anna Krasilnikova, Alexandra Haise, Wolfgang Riede, Ona Balachninaite, Rimantas Grigonis, Valdas Sirutkaitis, Vladimir Kazakevich

Proceedings Volume 4932, (2003) https://doi.org/10.1117/12.472005

KEYWORDS: Reflectivity, Laser optics, Laser induced damage, Digital video discs, Laser therapeutics, Transmittance, Laser components, Spectrophotometry, Dielectric mirrors

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Proceedings Article | 10 December 2001 Paper

X-ray study of surfaces and interfaces

Victor Asadchikov, Inna Bukreeva, Angela Duparre, Igor Kozhevnikov, Yury Krivonosov, Christian Morawe, Mikhail Pyatakhin, Joerg Steinert, Alexander Vinogradov, Eric Ziegler

Proceedings Volume 4449, (2001) https://doi.org/10.1117/12.450102

KEYWORDS: Reflectivity, X-rays, Scattering, Multilayers, Inverse problems, Interfaces, Spatial frequencies, Atomic force microscopy, Silicon, Mirrors

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