The effect of transparent film on its surface 3-D mapping by using vertical scanning white light interferometer

Xiaodong Wu; Feng Lei; Toyohiko Yatagai

doi:10.1117/12.666868

9 December 2005 The effect of transparent film on its surface 3-D mapping by using vertical scanning white light interferometer

Xiaodong Wu, Feng Lei, Toyohiko Yatagai

Author Affiliations +

Proceedings Volume 6024, ICO20: Optical Devices and Instruments; 60241N (2005) https://doi.org/10.1117/12.666868
Event: ICO20:Optical Devices and Instruments, 2005, Changchun, China

Abstract

We have investigated the effect of transparent thin film while mapping its surface profile by using vertical scanning white light interferometer. Our theory analysis showed that multiple reflections taking place within the transparent thin film result in an extra phase change. The simulation and experiment results revealed that this extra phase change is also related to the thickness of thin film, the numerical number of microscope interferometer objective and the spectral distribution of light source. As a result of extra phase change, the interferogram has some deviation in its shape or two interference fringes may appears while the thickness of thin film is large.

Citation Download Citation

Xiaodong Wu, Feng Lei, and Toyohiko Yatagai "The effect of transparent film on its surface 3-D mapping by using vertical scanning white light interferometer", Proc. SPIE 6024, ICO20: Optical Devices and Instruments, 60241N (9 December 2005); https://doi.org/10.1117/12.666868

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available