Refractive index and thickness of coating measurement interferometer

Chao-Yuan Wu; Kai Wu; Sheng-Hui Chen; Cheng-Chung Lee

doi:10.1117/12.825815

20 August 2009 Refractive index and thickness of coating measurement interferometer

Chao-Yuan Wu, Kai Wu, Sheng-Hui Chen, Cheng-Chung Lee

Proceedings Volume 7409, Thin Film Solar Technology; 74090S (2009) https://doi.org/10.1117/12.825815
Event: SPIE Solar Energy + Technology, 2009, San Diego, California, United States

Abstract

We proposed a method to measure the optical constants of thin film through polarizing phase shifting interferometer based on Twyman-Green interferometer structure. A broadband light source coming with a narrow band-pass filter was used to generate a low coherence light and the wavelength is tunable by changing the filter. A pixelated micro-polarizer mask on the detection camera made phase shifting array to make different phase shifts at once. Therefore, we can use one single interferogram to extract phase information, and it is effective in reducing environmental vibration. The refractive index and thickness of thin film can be derived from the obtained reflection coefficient's magnitude and phase. The measurement results were compared with the results obtained by an ellipsometer.

Citation Download Citation

Chao-Yuan Wu, Kai Wu, Sheng-Hui Chen, and Cheng-Chung Lee "Refractive index and thickness of coating measurement interferometer", Proc. SPIE 7409, Thin Film Solar Technology, 74090S (20 August 2009); https://doi.org/10.1117/12.825815

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