Paper
5 December 2005 Design and parameter optimization of flip-chip bonder
Author Affiliations +
Proceedings Volume 6048, Optomechatronic Actuators and Manipulation; 60480G (2005) https://doi.org/10.1117/12.648757
Event: Optomechatronic Technologies 2005, 2005, Sapporo, Japan
Abstract
Bare-chip packaging becomes more popular along with the miniaturization of IT components. In this paper, we have studied flip-chip process, and developed automated bonding system. Among the several bonding method, NCP bonding is chosen and batch-type equipment is manufactured. The dual optics and vision system aligns the chip with the substrate. The bonding head equipped with temperature and force controllers bonds the chip. The system can be easily modified for other bonding methods such as ACF. In bonding process, the bonding force and temperature are known as the most dominant bonding parameters. A parametric study is performed for these two parameters. For the test sample, we used standard flip-chip test kit which consists of FR4 boards and dummy flip-chips. The bonding temperatures are chosen between 25°C to 300°C. The bonding forces are chosen between 5N and 300N. To test the bonding strength, a bonding strength tester was designed and constructed. After the bonding strength test, the samples are examined by microscope to determine the failure mode. The relations between the bonding strength and the bonding parameters are analyzed and compared with bonding models. Finally, the most suitable bonding condition is suggested in terms of temperature and force.
© (2005) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Hyoungsub Shim, Heuiseok Kang, Hoon Jeong, Youngjune Cho, Wansoo Kim, and Shinill Kang "Design and parameter optimization of flip-chip bonder", Proc. SPIE 6048, Optomechatronic Actuators and Manipulation, 60480G (5 December 2005); https://doi.org/10.1117/12.648757
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KEYWORDS
Head

Scanning electron microscopy

Semiconducting wafers

Wafer bonding

Manufacturing

Temperature metrology

Optics manufacturing

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