Laser treatment of micro-components’ surface for improved tribological applications

Kaidong Ye; Yeow-Whatt Goh; Cheow-Tong Cheng; Ching-Biing Yeo; Minghui Hong

doi:10.1117/12.645602

1 March 2006 Laser treatment of micro-components' surface for improved tribological applications

Kaidong Ye, Yeow-Whatt Goh, Cheow-Tong Cheng, Ching-Biing Yeo, Minghui Hong

Proceedings Volume 6106, Photon Processing in Microelectronics and Photonics V; 61060X (2006) https://doi.org/10.1117/12.645602
Event: Lasers and Applications in Science and Engineering, 2006, San Jose, California, United States

Abstract

We are proposing a method and system to mount and treat the surface of a fabricated micro-component to improve its tribological performance. By irradiating an infrared laser under ambient conditions, the heat will penetrate the micro-component's surface, causing it to melt and flow to reduce the amount of irregularity. This method can create a desired surface finishing with good repeatability on selected regions of the micro-components. It can also work on surfaces of various material types as well as internal surfaces of thin planar or circular structure. By changing the laser power, the repetition rate and the scanning speed, the process can deal with surfaces of different roughness. The final surface roughness can be improved from micro-meter level to sub-100nm level. The laser treated micro-components have improved tribological performance as the friction is reduced; the abrasion, heat and noise are also reduced. The improvement can enhance the lifetime of the micro-component when used in micro rotating or sliding mechanism.

Citation Download Citation

Kaidong Ye, Yeow-Whatt Goh, Cheow-Tong Cheng, Ching-Biing Yeo, and Minghui Hong "Laser treatment of micro-components' surface for improved tribological applications", Proc. SPIE 6106, Photon Processing in Microelectronics and Photonics V, 61060X (1 March 2006); https://doi.org/10.1117/12.645602

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KEYWORDS

Laser therapeutics

Surface finishing

Surface roughness

Silicon

Semiconductor lasers

Laser scanners

Polishing

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