Requirements and suggestions for an industrial smooth surface microroughness standards

John C. Stover

doi:10.1117/12.256192

4 November 1996 Requirements and suggestions for an industrial smooth surface microroughness standards

John C. Stover

Proceedings Volume 2862, Flatness, Roughness, and Discrete Defect Characterization for Computer Disks, Wafers, and Flat Panel Displays; (1996) https://doi.org/10.1117/12.256192
Event: SPIE's 1996 International Symposium on Optical Science, Engineering, and Instrumentation, 1996, Denver, CO, United States

Abstract

A number of physical standards are available for the measurement of surface roughness, but none of them are applicable to use with the very smooth surfaces being manufactured in the semiconductor, computer disk and flat panel display industries. This paper reviews some of the issues and suggests possible approaches for realizing such standards. Suggestions include grating like surfaces, very square steps and isotropic (polished) silicon.

Citation Download Citation

John C. Stover "Requirements and suggestions for an industrial smooth surface microroughness standards", Proc. SPIE 2862, Flatness, Roughness, and Discrete Defect Characterization for Computer Disks, Wafers, and Flat Panel Displays, (4 November 1996); https://doi.org/10.1117/12.256192

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