Design of a coherent optical interferometric system

Jiancheng Xu; Guiping Sheng; Liqun Chai; Qiao Xu; Yan Deng

doi:10.1117/12.676409

19 May 2006 Design of a coherent optical interferometric system

Jiancheng Xu, Guiping Sheng, Liqun Chai, Qiao Xu, Yan Deng

Proceedings Volume 6150, 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 61501B (2006) https://doi.org/10.1117/12.676409
Event: 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies, 2005, Xian, China

Abstract

A 100-mm-aperture high lateral resolution interferometer has been developed in Fine Optical Engineering Research Center (FOERC), which is applied to the measurement of spatial frequencies of up to 2.5 lines/mm over a 100mm field of view. The system transfer function of the interferometer is greater than 60% at near half the Nyquist frequency. To demonstrate the performance of this high lateral resolution interferometer, theoretical errors of the system are thoroughly analyzed and the design implementation is carefully studied, such as light source, wave front slope, tolerance analysis, CCD sample and so on.

Citation Download Citation

Jiancheng Xu, Guiping Sheng, Liqun Chai, Qiao Xu, and Yan Deng "Design of a coherent optical interferometric system", Proc. SPIE 6150, 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 61501B (19 May 2006); https://doi.org/10.1117/12.676409

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