Design of 4"-high spatial resolution interferometer

Gui-ping Shen; Qiao Xu; Xiangyang Lei

doi:10.1117/12.678603

23 February 2006 Design of 4"-high spatial resolution interferometer

Gui-ping Shen, Qiao Xu, Xiangyang Lei

Proceedings Volume 6150, 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 615039 (2006) https://doi.org/10.1117/12.678603
Event: 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies, 2005, Xian, China

Abstract

The goal of this 4" phase shifting Fizeau interferometer design is to measure the small scale deformations of the optical surface down to 0.1 millimeter in 100 millimeter diameter. In this paper, the factors of affecting the wavefront information testing in medium and high frequencies are analyzed. The general description of the 4" high spatial resolution interferometer is provided and the design of the major optical components in the interferometer is described. Finally, the interferograms of such kind of high spatial resolution interferometer producing are showed, and the last result is analyzed.

Citation Download Citation

Gui-ping Shen, Qiao Xu, and Xiangyang Lei "Design of 4"-high spatial resolution interferometer", Proc. SPIE 6150, 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 615039 (23 February 2006); https://doi.org/10.1117/12.678603

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