Linear sizes measurements of relief elements with the width less than 100 nm on a SEM

Yu. A. Novikov; A. V. Rakov; P. A. Todua

doi:10.1117/12.683401

10 June 2006 Linear sizes measurements of relief elements with the width less than 100 nm on a SEM

Yu. A. Novikov, A. V. Rakov, P. A. Todua

Proceedings Volume 6260, Micro- and Nanoelectronics 2005; 626015 (2006) https://doi.org/10.1117/12.683401
Event: Micro- and Nanoelectronics 2005, 2005, Zvenigorod, Russian Federation

Abstract

A method has been suggested for measuring the line width of trapezoidal profile relief elements on a scanning electron microscope (SEM) for cases where the electron probe diameter is greater than the measured size. The method has been demonstrated on low voltage SEM. The minimum size that could be measured was 13 nm, which is almost in 2 times smaller than the low voltage SEM electron probe diameter.

Citation Download Citation

Yu. A. Novikov, A. V. Rakov, and P. A. Todua "Linear sizes measurements of relief elements with the width less than 100 nm on a SEM", Proc. SPIE 6260, Micro- and Nanoelectronics 2005, 626015 (10 June 2006); https://doi.org/10.1117/12.683401

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