Reducing process contributions to CD error range using the Sigma7500 pattern generator and ProcessEqualizer

Jonas Hellgren; Hans Fosshaug; Anders Österberg; Lars Ivansen

doi:10.1117/12.681743

20 May 2006 Reducing process contributions to CD error range using the Sigma7500 pattern generator and ProcessEqualizer^TM

Jonas Hellgren, Hans Fosshaug, Anders Österberg, Lars Ivansen

Author Affiliations +

Proceedings Volume 6283, Photomask and Next-Generation Lithography Mask Technology XIII; 62831I (2006) https://doi.org/10.1117/12.681743
Event: Photomask and Next Generation Lithography Mask Technology XIII, 2006, Yokohama, Japan

Abstract

Photomask CD control requirements continue to tighten due to inevitable device scaling, in addition to the increasing mask error enhancement factor (MEEF). Managing the total CD error on production masks requires not only that the error contributions from the pattern generator should be minimized, but also that there is a way to handle errors due to the mask process. This paper addresses process-related contributions such as the CD signatures from mask developing and etching, and how their impact on the total CD error range can be reduced. This is accomplished using the on-line ProcessEquilizer^TM function in the Sigma7500 DUV laser pattern generator. Long range and medium range process CD errors are major contributors to the total CD error range. These errors can be classified as being either pattern-independent or pattern-dependent. Pattern-independent errors may occur in the bake, develop and etch process steps. These errors are by definition static from mask to mask, and can therefore be mapped and compensated by local sizing of the mask pattern data. Pattern-dependent errors typically originate from loading effects, for example, in plasma etching. If such errors can be predicted from the pattern density variation across the mask, then they can also be corrected for with local sizing. The on-line ProcessEqualizer^TM function performs local sizing, and offers a significant advantage over off-line solutions that have the drawback of requiring flattening and refracturing of the pattern data. Local sizing is performed in parallel with writing in the Sigma7500, and has no effect on throughput. In this paper the ProcessEqualizer^TM function is described, including how it is operated in the maskshop. Results are presented demonstrating the performance of the ProcessEqualizer^TM for handling global CD error signatures.

Citation Download Citation

Jonas Hellgren, Hans Fosshaug, Anders Österberg, and Lars Ivansen "Reducing process contributions to CD error range using the Sigma7500 pattern generator and ProcessEqualizer^TM", Proc. SPIE 6283, Photomask and Next-Generation Lithography Mask Technology XIII, 62831I (20 May 2006); https://doi.org/10.1117/12.681743

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available