Improved design of large 3D micromirrors for microassembly into an optical MEMS cross-connect

Mohamed A. Basha; Nikolai Dechev; Safieddin Safavi-Naeini; Sujeet K. Chaudhuri

doi:10.1117/12.754398

10 October 2007 Improved design of large 3D micromirrors for microassembly into an optical MEMS cross-connect

Mohamed A. Basha, Nikolai Dechev, Safieddin Safavi-Naeini, Sujeet K. Chaudhuri

Proceedings Volume 6717, Optomechatronic Micro/Nano Devices and Components III; 67170I (2007) https://doi.org/10.1117/12.754398
Event: International Symposium on Optomechatronic Technologies, 2007, Lausanne, Switzerland

Abstract

A robotic-based microassembly process has been successfully applied to the construction of a novel micromirror design for use in optical switching. This paper is devoted to the description of a modified microassembly technique to construct a 3-D rotating inclined micromirror (3DRIM) that incorporate large micromirrors. The microassembly process is based upon the PMKIL (Passive Microgripper, Key and Inter-Lock) assembly system. The new modified assembly technique uses three supporting microparts: Two support posts and one cross-support post. Details of the assembly process to construct the micromirror and the design of the microparts are described. The results of the assembly process are presented, along with examples of prototype 3DRIMs. The 3DRIM is used as a building element for 1×N optical switching systems and for N ×M optical cross-connects.

Citation Download Citation

Mohamed A. Basha, Nikolai Dechev, Safieddin Safavi-Naeini, and Sujeet K. Chaudhuri "Improved design of large 3D micromirrors for microassembly into an optical MEMS cross-connect", Proc. SPIE 6717, Optomechatronic Micro/Nano Devices and Components III, 67170I (10 October 2007); https://doi.org/10.1117/12.754398

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