Optical MEMS devices based on micromachined torsion structure

Yaming Wu; Jing Xu; Sihua Li; Zhujun Wan; Canjun Mu

doi:10.1117/12.769034

4 January 2008 Optical MEMS devices based on micromachined torsion structure

Yaming Wu, Jing Xu, Sihua Li, Zhujun Wan, Canjun Mu

Proceedings Volume 6836, MEMS/MOEMS Technologies and Applications III; 683606 (2008) https://doi.org/10.1117/12.769034
Event: Photonics Asia 2007, 2007, Beijing, China

Abstract

Optical MEMS components with optical fiber inputs and outputs are the most important kinds of optical MEMS devices because of their applications in optical communication industry and fiber-optic sensors. Efficient optical coupling is the key to develop optical MEMS devices for optical communication and sensing, however, efficient coupling between MEMS actuators or sensing structures and optical fibers is a challenging job. Besides high performance MEMS actuators and coupling micro-optics are needed, the MEMS structures should adapt to coupling micro-optics. The torsion MEMS micro-mirrors and gratings can couple with fiber collimators at low insertion loss, therefore, the torsion MEMS structure is a good choice for optical MEMS devices, especially for continuous or multi-level controlled devices. In this paper, we report three kinds of optical MEMS devices based on silicon torsion micro structure, MEMS variable optical attenuator (VOA), 1×8 MEMS optical switch and high-speed MEMS torsion blazed grating , which have been developed recently in our optical MEMS research group. The three devices are coupled with optical fibers by optical fiber collimators, so low loss coupling can be achieved.

Citation Download Citation

Yaming Wu, Jing Xu, Sihua Li, Zhujun Wan, and Canjun Mu "Optical MEMS devices based on micromachined torsion structure", Proc. SPIE 6836, MEMS/MOEMS Technologies and Applications III, 683606 (4 January 2008); https://doi.org/10.1117/12.769034

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