Novel method of designing deformable polishing lap

Ziqiang Hu; Ning Ling

doi:10.1117/12.783523

29 November 2007 Novel method of designing deformable polishing lap

Ziqiang Hu, Ning Ling

Proceedings Volume 6722, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies; 67223C (2007) https://doi.org/10.1117/12.783523
Event: 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Large Mirrors and Telescopes, 2007, Chengdu, China

Abstract

In aspheric mirror polishing progress, the deformable polishing lap can change the lap surface to fit the surface of aspheric optical mirror. This paper presents a novel method of designing deformable polishing lap by using piezoceramics driver. The rationale of the new type deformable polishing lap is introduced. The calculation of piezoceramics driver deformation is explored and a correction of calculation formula is brought forward. A new type deformable polishing lap 110 mm in diameter was designed and built to polish the aspheric mirror. It consists of an aluminum disk which changes shape continuously under the control of 84 piezoceramics driver. The aspheric surfaces created by the new type deformable polishing lap are measured with micro displacement transducer. The results show that the new type deformable polishing lap can reshape to fit the surface of aspheric mirror and the maximal difference is less than 2um.

Citation Download Citation

Ziqiang Hu and Ning Ling "Novel method of designing deformable polishing lap", Proc. SPIE 6722, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 67223C (29 November 2007); https://doi.org/10.1117/12.783523

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