Paper
28 October 2016 The advancement of the high precision stress polishing
Chaoqiang Li, Baiping Lei, Yu Han
Author Affiliations +
Proceedings Volume 9683, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies; 96831F (2016) https://doi.org/10.1117/12.2243234
Event: Eighth International Symposium on Advanced Optical Manufacturing and Testing Technology (AOMATT2016), 2016, Suzhou, China
Abstract
The stress polishing is a kind of large-diameter aspheric machining technology with high efficiency. This paper focuses on the principle, application in the processing of large aspheric mirror, and the domestic and foreign research status of stress polishing, aimed at the problem of insufficient precision of mirror surface deformation calculated by some traditional theories and the problem that the output precision and stability of the support device in stress polishing cannot meet the requirements. The improvement methods from these three aspects are put forward, the characterization method of mirror’s elastic deformation in stress polishing, the deformation theory of influence function and the calculation of correction force, the design of actuator’s mechanical structure. These improve the precision of stress polishing and provide theoretical basis for the further application of stress polishing in large-diameter aspheric machining.
© (2016) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Chaoqiang Li, Baiping Lei, and Yu Han "The advancement of the high precision stress polishing", Proc. SPIE 9683, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 96831F (28 October 2016); https://doi.org/10.1117/12.2243234
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Cited by 1 scholarly publication.
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KEYWORDS
Polishing

Mirrors

Surface finishing

Actuators

Aspheric lenses

Ions

Spherical lenses

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