Design and fabrication of soft x-ray transmission phase gratings

Keqiang Qiu; Xiangdong Xu; Ying Liu; Yilin Hong; Shaojun Fu

doi:10.1117/12.783542

14 November 2007 Design and fabrication of soft x-ray transmission phase gratings

Keqiang Qiu, Xiangdong Xu, Ying Liu, Yilin Hong, Shaojun Fu

Proceedings Volume 6722, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies; 67223R (2007) https://doi.org/10.1117/12.783542
Event: 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Large Mirrors and Telescopes, 2007, Chengdu, China

Abstract

A binary transmission phase grating is designed to operate as a dispersive element used in soft x-ray plasma diagnostic in ICF (inertial confinement fusion). The first and zero orders diffraction efficiency is simulated as a function of wave length and grating thickness. It is shown that the first order diffraction efficiency of a transmission phase grating can be up to 23.3% of the incident light, whereas that is not more than 10% for a conventional amplitude transmission grating. The transmission phase grating is fabricated in gold film supported by polyimide membranes using holography and ion beam etching method. The primary experimental results are presented.

Citation Download Citation

Keqiang Qiu, Xiangdong Xu, Ying Liu, Yilin Hong, and Shaojun Fu "Design and fabrication of soft x-ray transmission phase gratings", Proc. SPIE 6722, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 67223R (14 November 2007); https://doi.org/10.1117/12.783542

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