Patterning of inorganic polymer glass waveguiding films by dry etching

S. J. Madden; M. Zhang; B. Luther-Davies; R. Charters

doi:10.1117/12.760843

8 January 2008 Patterning of inorganic polymer glass waveguiding films by dry etching

S. J. Madden, M. Zhang, B. Luther-Davies, R. Charters

Proceedings Volume 6801, Photonics: Design, Technology, and Packaging III; 680107 (2008) https://doi.org/10.1117/12.760843
Event: SPIE Microelectronics, MEMS, and Nanotechnology, 2007, Canberra, ACT, Australia

Abstract

Polymer waveguides have long been of interest for low cost integrated optical devices. Inorganic Polymer glasses are a class of materials based around polysiloxanes which have many attractive features for low cost integrated optics and meet the stringent reliability requirements for deployment in carrier networks. The inorganic polymer glasses available for this work are normally patterned as negative photoresists but this leads to a resolution limit on the achievable feature size due to free radical diffusion. Therefore we demonstrate here high quality dry etching of these materials using standard photoresist masking and the fabrication of small high index contrast waveguides with losses marginally higher than the intrinsic materials losses.

Citation Download Citation

S. J. Madden, M. Zhang, B. Luther-Davies, and R. Charters "Patterning of inorganic polymer glass waveguiding films by dry etching", Proc. SPIE 6801, Photonics: Design, Technology, and Packaging III, 680107 (8 January 2008); https://doi.org/10.1117/12.760843

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available