Self-assembled single-digit micro-display on plastic

Ehsan Saeedi; Samuel Kim; Harvey Ho; Babak A. Parviz

doi:10.1117/12.768289

6 February 2008 Self-assembled single-digit micro-display on plastic

Ehsan Saeedi, Samuel Kim, Harvey Ho, Babak A. Parviz

Proceedings Volume 6885, MEMS/MOEMS Components and Their Applications V. Special Focus Topics: Transducers at the Micro-Nano Interface; 688509 (2008) https://doi.org/10.1117/12.768289
Event: MOEMS-MEMS 2008 Micro and Nanofabrication, 2008, San Jose, California, United States

Abstract

We present the design and construction of a micro-display consisting of independently microfabricated light emitting diodes (LEDs) and silicon transistors on unconventional substrates such as flexible plastics. The fabrication process takes advantage of self-assembly to form the display. Silicon microcomponents and AlGaAs red LEDs were microfabricated and released to form a powder-like collection of parts. A plastic template containing binding sites was independently microfabricated. Each binding site on the template consisted of a well with a shape complementary to that of the released component. Self-assembly process was conducted in a fluidic medium to allow the microcomponents to assemble in proper receptor sites on the flexible template. We showed self-assembly of both LEDs and driving circuitry for display on plastic template. We got more than 90% yield for physically positioning the parts on template, with electrical connection yield of 62%.

Citation Download Citation

Ehsan Saeedi, Samuel Kim, Harvey Ho, and Babak A. Parviz "Self-assembled single-digit micro-display on plastic", Proc. SPIE 6885, MEMS/MOEMS Components and Their Applications V. Special Focus Topics: Transducers at the Micro-Nano Interface, 688509 (6 February 2008); https://doi.org/10.1117/12.768289

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