A thick GaN growth using GaN/Si(111) template by hydride vapor phase epitaxy(HVPE)

Doo Soo Kim; Ho Jun Lee; Yong Jin Kim; Su Kim Jung; Dong Kun Lee; Bo Young Lee

doi:10.1117/12.765705

28 February 2008 A thick GaN growth using GaN/Si(111) template by hydride vapor phase epitaxy(HVPE)

Doo Soo Kim, Ho Jun Lee, Yong Jin Kim, Su Kim Jung, Dong Kun Lee, Bo Young Lee

Proceedings Volume 6894, Gallium Nitride Materials and Devices III; 689406 (2008) https://doi.org/10.1117/12.765705
Event: Integrated Optoelectronic Devices 2008, 2008, San Jose, California, United States

Abstract

The thick GaN layers were grown on GaN/Si(111) templates by hydride vapor phase epitaxy (HVPE). The GaN templates were grown by metal organic chemical vapor deposition (MOCVD), and there were remained some cracks on their layers. The silicon (Si) substrates were not treated any patterning process. The size of template was 2inch Si(111) wafer and these templates were directly used for HVPE growth. For the growth of the thick GaN layer, the gas injection system of HVPE was modified for improving its growth rate. The proper growth temperature and V/III ratio gave us a transparent thick GaN layer and its thickness has been over than 100um for 2 hours. After the growth, the Si substrate was etched by Si etching solution. We obtained a transparent thick GaN layer and its size was 1/4 inch as the biggest size and it was bended. Structural and optical properties of thick GaN layer were characterized by high resolution X-ray diffraction (HRXRD) and photoluminescence (PL) measurements.

Citation Download Citation

Doo Soo Kim, Ho Jun Lee, Yong Jin Kim, Su Kim Jung, Dong Kun Lee, and Bo Young Lee "A thick GaN growth using GaN/Si(111) template by hydride vapor phase epitaxy(HVPE)", Proc. SPIE 6894, Gallium Nitride Materials and Devices III, 689406 (28 February 2008); https://doi.org/10.1117/12.765705

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available