Characterization of extreme ultraviolet emission from tin-droplets irradiated with Nd:YAG laser plasmas

Tatsuya Aota; Yuki Nakai; Shinsuke Fujioka; Etsuo Fujiwara; Masashi Shimomura; Hiroaki Nishimura; Nobukatsu Nishihara; Noriaki Miyanaga; Yasukazu Izawa; Kunioki Mima

doi:10.1117/12.771536

21 March 2008 Characterization of extreme ultraviolet emission from tin-droplets irradiated with Nd:YAG laser plasmas

Tatsuya Aota, Yuki Nakai, Shinsuke Fujioka, Etsuo Fujiwara, Masashi Shimomura, Hiroaki Nishimura, Nobukatsu Nishihara, Noriaki Miyanaga, Yasukazu Izawa, Kunioki Mima

Author Affiliations +

Proceedings Volume 6921, Emerging Lithographic Technologies XII; 69212T (2008) https://doi.org/10.1117/12.771536
Event: SPIE Advanced Lithography, 2008, San Jose, California, United States

Abstract

EUV emission from spherical and planer targets were precisely characterized as an experimental database for use in EUV source generation at high repetition rates. In the single-shot base experiments, conversion efficiency as high as those for the plasma geometry has been demonstrated. The integrated experiment was made with 10 Hz plasma generation.

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Tatsuya Aota, Yuki Nakai, Shinsuke Fujioka, Etsuo Fujiwara, Masashi Shimomura, Hiroaki Nishimura, Nobukatsu Nishihara, Noriaki Miyanaga, Yasukazu Izawa, and Kunioki Mima "Characterization of extreme ultraviolet emission from tin-droplets irradiated with Nd:YAG laser plasmas", Proc. SPIE 6921, Emerging Lithographic Technologies XII, 69212T (21 March 2008); https://doi.org/10.1117/12.771536

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