X-ray images of dislocation loops and barriers in silicon crystals in the case of transmission geometry

D. Fedortsov; I. Fodchuk; S. Novikov; A. Struk

doi:10.1117/12.797223

22 April 2008 X-ray images of dislocation loops and barriers in silicon crystals in the case of transmission geometry

D. Fedortsov, I. Fodchuk, S. Novikov, A. Struk

Proceedings Volume 7008, Eighth International Conference on Correlation Optics; 70081A (2008) https://doi.org/10.1117/12.797223
Event: Eighth International Conference on Correlation Optics, 2007, Chernivsti, Ukraine

Abstract

In this work on the basis of numerical solution of Takagi's equations the diffraction images of various types possible in silicon dislocation loops and barriers are constructed in the case of transmission geometry. The three-dimensional total misorientation functions of dislocation loops and barriers are calculated and its cross sections are analysed. X-ray images of dislocation loops and barriers are simulated in the cases of "thin" (μt<1) and "thick" (μt>10) crystals.

Citation Download Citation

D. Fedortsov, I. Fodchuk, S. Novikov, and A. Struk "X-ray images of dislocation loops and barriers in silicon crystals in the case of transmission geometry", Proc. SPIE 7008, Eighth International Conference on Correlation Optics, 70081A (22 April 2008); https://doi.org/10.1117/12.797223

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