Uncertainty consideration of the mirror-interferometer system in nanopositioning and nanomeasuring machines

R. Füßl; R. Grünwald; Ph. Kreutzer

doi:10.1117/12.797058

11 August 2008 Uncertainty consideration of the mirror-interferometer system in nanopositioning and nanomeasuring machines

R. Füßl, R. Grünwald, Ph. Kreutzer

Author Affiliations +

Proceedings Volume 7064, Interferometry XIV: Applications; 70640L (2008) https://doi.org/10.1117/12.797058
Event: Optical Engineering + Applications, 2008, San Diego, California, United States

Abstract

The paper deals with the analysis of the uncertainty of high precision long range three-dimensional Nanopositioning and Nanomeasuring Machines (NPMM). Those high-tech instruments consisting of precision 3d-guides, interferometers, a 3d-reference-mirror and nanoprobes, connected by a stabile frame are subject of research. Especially the interferometer mirror system characterizes the precision of such machines. Therefore a new vectorial metrological model will be described to characterize this machine part. Its properties and advantages are shown and the model is used to analyze the uncertainty budget of a concrete Nanopositioning and Nanomeasuring Machine.

Citation Download Citation

R. Füßl, R. Grünwald, and Ph. Kreutzer "Uncertainty consideration of the mirror-interferometer system in nanopositioning and nanomeasuring machines", Proc. SPIE 7064, Interferometry XIV: Applications, 70640L (11 August 2008); https://doi.org/10.1117/12.797058

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