Analysis of the elastic mechanism for contact scanning probe

Rui-Jun Li; Sheng Tao; Kuang-Chao Fan

doi:10.1117/12.2014421

31 January 2013 Analysis of the elastic mechanism for contact scanning probe

Rui-Jun Li, Sheng Tao, Kuang-Chao Fan

Proceedings Volume 8759, Eighth International Symposium on Precision Engineering Measurement and Instrumentation; 87590M (2013) https://doi.org/10.1117/12.2014421
Event: International Symposium on Precision Engineering Measurement and Instrumentation 2012, 2012, Chengdu, China

Abstract

High precision contact scanning probes for measuring miniature components on micro- and nano-coordinate measuring machines require elastic mechanisms. In order to realize the probe’s mechanical behavior and stiffness when designing an elastic mechanism for a contact scanning probe, the elastic mechanism is analyzed by the theory of elasticity and finite element analysis in this paper. The contact scanning probe is composed of a fiber stylus with a ball tip, a mechanism of floating plate suspended by four leaf springs, and two optical sensors. The leaf springs experience elastic deformation when a contact force is applied. Uniform stiffness model is analyzed. Simulation and experimental results verify the correctness of the analysis.

Citation Download Citation

Rui-Jun Li, Sheng Tao, and Kuang-Chao Fan "Analysis of the elastic mechanism for contact scanning probe", Proc. SPIE 8759, Eighth International Symposium on Precision Engineering Measurement and Instrumentation, 87590M (31 January 2013); https://doi.org/10.1117/12.2014421

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